Method for manufacturing semiconductor device

ABSTRACT

A larger substrate can be used, and a transistor having a desirably high field-effect mobility can be manufactured through formation of an oxide semiconductor layer having a high degree of crystallinity, whereby a large-sized display device, a high-performance semiconductor device, or the like can be put into practical use. A first multi-component oxide semiconductor layer is formed over a substrate and a single-component oxide semiconductor layer is formed thereover; then, crystal growth is carried out from a surface to an inside by performing heat treatment at 500° C. to 1000° C. inclusive, preferably 550° C. to 750° C. inclusive so that a first multi-component oxide semiconductor layer including single crystal regions and a single-component oxide semiconductor layer including single crystal regions are formed; and a second multi-component oxide semiconductor layer including single crystal regions is stacked over the single-component oxide semiconductor layer including single crystal regions.

TECHNICAL FIELD

The present invention relates to a semiconductor device which includes acircuit including at least a semiconductor element such as a transistoras an element, and a manufacturing method thereof. For example, thepresent invention relates to an electronic device which includes, as acomponent, any of a power device mounted in a power circuit, asemiconductor integrated circuit including a memory, a thyristor, aconverter, an image sensor, or the like, an electro-optical devicetypified by a liquid crystal display panel, and a light-emitting displaydevice including a light-emitting element.

In this specification, a semiconductor device generally means a devicewhich can function by utilizing semiconductor characteristics, and anelectro-optical device, a semiconductor circuit, and an electronicdevice are all semiconductor devices.

BACKGROUND ART

A transistor formed over a glass substrate or the like is manufacturedusing amorphous silicon, polycrystalline silicon, or the like, astypically seen in a liquid crystal display device. Although a transistormanufactured using amorphous silicon has low field-effect mobility, ithas an advantage of being able to be formed over a larger glasssubstrate. On the other hand, although a transistor manufactured usingpolycrystalline silicon has high field-effect mobility, it has adisadvantage of not being suitable for a larger glass substrate.

In contrast to a transistor manufactured using silicon, a technique inwhich a transistor is manufactured using an oxide semiconductor andapplied to an electronic device or an optical device has attractedattention. For example, Patent Document 1 and Patent Document 2 disclosea technique in which a transistor is manufactured using zinc oxide or anIn—Ga—Zn—O-based oxide as an oxide semiconductor and such a transistoris used as a switching element or the like of a pixel of a displaydevice.

[REFERENCE] [Patent Document]

-   [Patent Document 1] Japanese Published Patent Application No.    2007-123861-   [Patent Document 2] Japanese Published Patent Application No.    2007-096055

DISCLOSURE OF INVENTION

Further, large-sized display devices have increasingly become popular.Home-use televisions with a display screen diagonal of 40 inches to 50inches have started to spread.

The field-effect mobility of a transistor manufactured using aconventional oxide semiconductor is 10 cm²/Vs to 20 cm²/Vs. Since thefield-effect mobility of a transistor manufactured using an oxidesemiconductor is ten times or more as high as that of a transistormanufactured using amorphous silicon, the transistor manufactured usingan oxide semiconductor can provide a performance sufficient as a pixelswitching element even in a large-sized display device.

However, there has been a limitation on the transistor manufacturedusing an oxide semiconductor when being used as a switching element in adriving device of a semiconductor device, for example, in a drivercircuit of a large-sized display device or the like.

It is an object of an embodiment of the present invention to enable theuse of a larger substrate and the manufacture of a transistor having adesirably high field-effect mobility through formation of an oxidesemiconductor layer having a high degree of crystallinity, and also toput a large-sized display device, a high-performance semiconductordevice, or the like into practical use.

According to an embodiment of the present invention, a firstmulti-component oxide semiconductor layer is formed over a substrate anda single-component oxide semiconductor layer is formed over the firstmulti-component oxide semiconductor layer; then, crystal growth iscarried out from a surface to an inside by performing heat treatment at500° C. to 1000° C. inclusive, preferably 550° C. to 750° C. inclusive,so that a first multi-component oxide semiconductor layer includingsingle crystal regions and a single-component oxide semiconductor layerincluding single crystal regions are formed; and a secondmulti-component oxide semiconductor layer including single crystalregions is stacked over the single-component oxide semiconductor layerincluding single crystal regions. Note that single crystal regions ofeach of the first multi-component oxide semiconductor layer includingsingle crystal regions, the single-component oxide semiconductor layerincluding single crystal regions, and the second multi-component oxidesemiconductor layer including single crystal regions areflat-plate-shaped single crystal regions having uniform crystaldirection with respect to the surface thereof. The flat-plate-shapedsingle crystal regions have the a-b plane parallel to the surfacethereof and the c-axis in a direction perpendicular to the surfaces ofthe first multi-component oxide semiconductor layer including singlecrystal regions, the single-component oxide semiconductor layerincluding single crystal regions, and the second multi-component oxidesemiconductor layer including single crystal regions. The c-axisdirections of the first multi-component oxide semiconductor layerincluding single crystal regions, the single-component oxidesemiconductor layer including single crystal regions, and the secondmulti-component oxide semiconductor layer including single crystalregions correspond to the depth direction.

The single-component oxide semiconductor layer including single crystalregions is formed in the following manner: the single-component oxidesemiconductor layer is formed over the first multi-component oxidesemiconductor layer, and then, heat treatment at 500° C. to 1000° C.inclusive, preferably 550° C. to 750° C. inclusive is performed so thatcrystal growth is carried out from the surface to the inside. The singlecrystal regions which are formed at the surface of the single-componentoxide semiconductor layer including single crystal regions and in whichcrystals are aligned in the same crystal direction are formed in such amanner that crystal growth is carried out from the surface in a depthdirection; accordingly, the single crystal regions can be formed withoutbeing influenced by a base component of the single-component oxidesemiconductor layer. In addition, crystal growth of the firstmulti-component oxide semiconductor layer is carried out by epitaxialgrowth or axial growth from the surface of the first multi-componentoxide semiconductor layer with the use of the single-component oxidesemiconductor layer including single crystal regions as a seed crystal,so that the single crystal regions can be formed without beinginfluenced by a base component of the first multi-component oxidesemiconductor layer.

The second multi-component oxide semiconductor layer including singlecrystal regions can be formed in the following manner: the secondmulti-component oxide semiconductor layer is formed over thesingle-component oxide semiconductor layer including single crystalregions, and then, heat treatment at 100° C. to 500° C. inclusive,preferably 150° C. to 400° C. inclusive is performed, so that crystalgrowth is carried out toward the surface of the second multi-componentoxide semiconductor layer which is in an upper level than the surface ofthe single-component oxide semiconductor layer including single crystalregions. That is, the single-component oxide semiconductor layerincluding single crystal regions is a seed crystal for the secondmulti-component oxide semiconductor layer.

In addition, the second multi-component oxide semiconductor layerincluding single crystal regions can be formed in the following manner:the second multi-component oxide semiconductor layer is deposited overthe single-component oxide semiconductor layer including single crystalregions typically by a sputtering method while heating is performed at200° C. to 600° C. inclusive, preferably 200° C. to 550° C. inclusive,so that epitaxial growth or axial growth from the surface of thesingle-component oxide semiconductor layer including single crystalregions is carried out and the second multi-component oxidesemiconductor layer including single crystal regions can be formed. Thatis, the single-component oxide semiconductor layer including singlecrystal regions is a seed crystal for the second multi-component oxidesemiconductor layer including single crystal regions.

Since the crystal growth is carried out with the use of thesingle-component oxide semiconductor layer including single crystalregions as a seed crystal, the first multi-component oxide semiconductorlayer including single crystal regions and the second multi-componentoxide semiconductor layer including single crystal regions havesubstantially the same crystal direction as the single-component oxidesemiconductor layer including single crystal regions.

After that, the first multi-component oxide semiconductor layerincluding single crystal regions, the single-component oxidesemiconductor layer including single crystal regions, and the secondmulti-component oxide semiconductor layer including single crystalregions are etched into an island-shape, a source electrode and a drainelectrode are formed over the second multi-component oxide semiconductorlayer including single crystal regions which has an island-shape, and agate insulating layer and a gate electrode are formed, whereby atop-gate transistor can be manufactured.

Alternatively, a gate electrode and a gate insulating layer are formedover a substrate, a first multi-component oxide semiconductor layerincluding single crystal regions, a single-component oxide semiconductorlayer including single crystal regions, and a second multi-componentoxide semiconductor layer including single crystal regions are formedover the gate insulating layer, the first multi-component oxidesemiconductor layer including single crystal regions, thesingle-component oxide semiconductor layer including single crystalregions, and the second multi-component oxide semiconductor layerincluding single crystal regions are etched into an island-shape, and asource electrode and a drain electrode are formed, whereby a bottom-gatetransistor can be manufactured.

In addition, according to an embodiment of the present invention, asemiconductor device includes a thin film transistor which has thefollowing: an oxide semiconductor stack including a firstmulti-component oxide semiconductor layer including single crystalregions, a single-component oxide semiconductor layer including singlecrystal regions, and a second multi-component oxide semiconductor layerincluding single crystal regions, a gate electrode, a gate insulatinglayer provided between the oxide semiconductor stack and the gateelectrode, and a wiring electrically connected to the oxidesemiconductor stack.

Heat treatment for forming the first multi-component oxide semiconductorlayer including single crystal regions and the single-component oxidesemiconductor layer including single crystal regions and heat treatmentfor forming the second multi-component oxide semiconductor layerincluding single crystal regions are preferably performed in anatmosphere containing almost no hydrogen and moisture (e.g., a nitrogenatmosphere, an oxygen atmosphere, or a dry-air atmosphere). Through theheat treatment, dehydration or dehydrogenation for eliminating hydrogen,water, hydroxyl group, hydride, or the like from the single-componentoxide semiconductor layer and the multi-component oxide semiconductorlayers can be performed, whereby the first multi-component oxidesemiconductor layer including single crystal regions, thesingle-component oxide semiconductor layer including single crystalregions, and the second multi-component oxide semiconductor layerincluding single crystal regions can be highly purified. The heattreatment can be performed in the following manner: the temperature isincreased in an inert gas atmosphere and then the atmosphere is switchedduring the process to an atmosphere containing oxygen. In the case wherethe heat treatment is performed in an oxygen atmosphere, the oxidesemiconductor layer is oxidized, whereby an oxygen defect can berepaired. Even when measurement using thermal desorption spectroscopy(TDS) is performed at up to 450° C. on the oxide semiconductor layerincluding single crystal regions subjected to the heat treatment, atleast a peak of water at around 300° C. among two peaks of water is notdetected.

When the first multi-component oxide semiconductor layer includingsingle crystal regions and the second multi-component oxidesemiconductor layer including single crystal regions each contain In, ina flat-plate-shaped single crystal region, electron clouds of In overlapwith each other to be connected to each other, whereby electricalconductivity φ is increased. Therefore, the field-effect mobility of thetransistor can be increased.

In the highly purified first multi-component oxide semiconductorincluding single crystal regions, the highly purified single-componentoxide semiconductor including single crystal regions, and the highlypurified second multi-component oxide semiconductor including singlecrystal regions, the hydrogen concentration is lower than or equal to1×10¹⁸ cm³, preferably lower than or equal to 1×10¹⁰ cm⁻³, morepreferably substantially 0; the carrier density is lower than 1×10¹⁴cm⁻³, preferably lower than 1×10¹² cm⁻³, more preferably lower than1.45×10¹⁰ cm⁻³, which is lower than or equal to the lower limit ofmeasurement; and the band gap is greater than or equal to 2 eV,preferably greater than or equal to 2.5 eV, more preferably greater thanor equal to 3 eV.

Note that a transistor according to an embodiment of the presentinvention includes an insulated-gate field-effect transistor (IGFET) anda thin film transistor (TFT) in its category.

A transistor having a high field-effect mobility can be manufactured anda large-sized display device, a high-performance semiconductor device,and the like are realized even when a material of a substrate serving asa base is any material such as an oxide, a nitride, or metal.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a cross-sectional view illustrating a semiconductor deviceaccording to an embodiment of the present invention.

FIGS. 2A to 2E are cross-sectional views illustrating a process formanufacturing a semiconductor device according to an embodiment of thepresent invention.

FIG. 3 is a cross-sectional view illustrating a process formanufacturing a semiconductor device according to an embodiment of thepresent invention.

FIG. 4 is a diagram illustrating a process of crystal growth of an oxidesemiconductor layer.

FIGS. 5A to 5C are diagrams each illustrating a process of crystalgrowth of an oxide semiconductor layer.

FIGS. 6A and 6B are diagrams each illustrating a process of crystalgrowth of an oxide semiconductor layer.

FIGS. 7A to 7C are diagrams each illustrating a crystal structure of anoxide semiconductor layer.

FIGS. 8A to 8E are cross-sectional views illustrating a process formanufacturing a semiconductor device according to an embodiment of thepresent invention.

FIGS. 9A to 9D are cross-sectional views illustrating a process formanufacturing a semiconductor device according to an embodiment of thepresent invention.

FIGS. 10A and 10B are cross-sectional views illustrating a process formanufacturing a semiconductor device according to an embodiment of thepresent invention.

FIGS. 11A to 11D are cross-sectional views illustrating a process formanufacturing a semiconductor device according to an embodiment of thepresent invention.

FIGS. 12A to 12D are cross-sectional views illustrating a process formanufacturing a semiconductor device according to an embodiment of thepresent invention.

FIGS. 13A and 13B are cross-sectional views illustrating a process formanufacturing a semiconductor device according to an embodiment of thepresent invention.

FIGS. 14A to 14E are cross-sectional views illustrating a process formanufacturing a semiconductor device according to an embodiment of thepresent invention.

FIGS. 15A and 15B are cross-sectional views illustrating a process formanufacturing a semiconductor device according to an embodiment of thepresent invention.

FIG. 16 is a cross-sectional view illustrating a process formanufacturing a semiconductor device according to an embodiment of thepresent invention.

FIG. 17 is a cross-sectional view illustrating a semiconductor deviceaccording to an embodiment of the present invention.

FIG. 18 is a cross-sectional view illustrating a semiconductor deviceaccording to an embodiment of the present invention.

FIG. 19 is an equivalent circuit diagram illustrating a semiconductordevice according to an embodiment of the present invention.

FIGS. 20A and 20B are a top view and a cross-sectional view illustratinga semiconductor device according to an embodiment of the presentinvention.

FIGS. 21A and 21B are a top view and a cross-sectional view illustratinga semiconductor device according to an embodiment of the presentinvention.

FIG. 22 is a cross-sectional view illustrating a semiconductor deviceaccording to an embodiment of the present invention.

FIGS. 23A to 23E are diagrams each illustrating an embodiment of anelectronic device.

FIG. 24 is a diagram illustrating an embodiment of an electronic device.

BEST MODE FOR CARRYING OUT THE INVENTION

Embodiments of the present invention will be described in detail withreference to the accompanying drawings. Note that the present inventionis not limited to the following description, and it will be easilyunderstood by those skilled in the art that modes and details thereofcan be changed in various ways without departing from the spirit and thescope of the present invention. Therefore, the present invention shouldnot be construed as being limited to the description of the followingembodiments. Note that in the structures of the present inventiondescribed hereinafter, the same portions or portions having similarfunctions are denoted by the same reference numerals in differentdrawings, and description thereof is not repeated.

Note that in each drawing described in this specification, the size ofeach component or the thickness of each layer or the area is exaggeratedin some cases for clarification. Therefore, embodiments of the presentinvention are not always limited to such scales.

Note that terms such as “first”, “second”, and “third” in thisspecification are used in order to avoid confusion between componentsand do not set a limitation on number. Therefore, for example,description can be made even when “first” is replaced with “second” or“third”, as appropriate.

Note that “voltage” indicates a difference between potentials of twopoints, and “potential” indicates electrostatic energy (electricalpotential energy) of a unit charge at a given point in an electrostaticfield. Note that in general, a difference between a potential of onepoint and a reference potential (such as a ground potential) is merelycalled a potential or a voltage, and a potential and a voltage are usedas synonymous words in many cases. Thus, in this specification, apotential may be rephrased as a voltage and a voltage may be rephrasedas a potential unless otherwise specified.

Embodiment 1

FIG. 1 is a cross-sectional view illustrating a transistor 150 which isan embodiment of a structure of a semiconductor device. Note thatalthough the transistor 150 described here is an n-channel IGFET(insulated-gate field-effect transistor) whose carriers are electrons,the transistor 150 can be a p-channel IGFET. In this embodiment, thetransistor 150 having a top gate structure will be described.

In the transistor 150 illustrated in FIG. 1, a first multi-componentoxide semiconductor layer 103 a including single crystal regions, asingle-component oxide semiconductor layer 105 a including singlecrystal regions, and a second multi-component oxide semiconductor layer107 a including single crystal regions are stacked over a substrate 100(an oxide semiconductor stack), and wirings 108 a and 108 b functioningas a source electrode and a drain electrode are formed thereover. Inaddition, a gate insulating layer 112 is formed over the secondmulti-component oxide semiconductor layer 107 a including single crystalregions and the wirings 108 a and 108 b, and a gate electrode 114 isformed over the gate insulating layer 112 so as to face the firstmulti-component oxide semiconductor layer 103 a including single crystalregions, the single-component oxide semiconductor layer 105 a includingsingle crystal regions, and the second multi-component oxidesemiconductor layer 107 a including single crystal regions with the gateinsulating layer 112 provided therebetween. An insulating layer 116 maybe formed over the gate insulating layer 112 and the gate electrode 114.

Next, a method for forming the oxide semiconductor stack includingsingle crystal regions and the thin film transistor formed using theoxide semiconductor stack will be described with reference to FIGS. 2Ato 2E, FIG. 3, FIG. 4, FIGS. 5A to 5C, FIGS. 6A and 6B, and FIGS. 7A to7C.

A first multi-component oxide semiconductor layer 102 is formed over thesubstrate 100, and a single-component oxide semiconductor layer 104 isformed over the first multi-component oxide semiconductor layer 102 (seeFIG. 2A).

It is necessary that the substrate 100 at least has enough heatresistance to heat treatment performed later. When a glass substrate isused as the substrate 100, a glass substrate whose strain point ishigher than or equal to 730° C. is preferably used. As the glasssubstrate, for example, a glass material such as aluminosilicate glass,aluminoborosilicate glass, or barium borosilicate glass is used. Notethat a glass substrate containing BaO and B₂O₃ so that the amount of BaOis larger than that of B₂O₃ is preferably used.

Instead of the glass substrate, a substrate formed of an insulator, suchas a ceramic substrate, a quartz substrate, or a sapphire substrate canbe used. Alternatively, crystallized glass or the like can be used.Further alternatively, a substrate obtained by forming an insulatinglayer over a surface of a semiconductor substrate such as a siliconwafer or a surface of a conductive substrate formed of a metal materialcan be used.

As will be described later, according to this embodiment,crystallization of the first multi-component oxide semiconductor layer102 and the single-component oxide semiconductor layer 104 provided overthe substrate 100 does not depend on a material of the substrate whichserves as a base. Therefore, various materials can be used for thesubstrate 100 as described above.

The first multi-component oxide semiconductor layer 102 and thesingle-component oxide semiconductor layer 104 are formed by asputtering method or the like. The first multi-component oxidesemiconductor layer 102 can have a non-wurtzite crystal structure thatis a hexagonal crystal structure by heating. The non-wurtzite crystalstructure that is a hexagonal crystal structure is also called ahomologous structure. Note that the non-wurtzite crystal structure is acrystal structure which is not a wurtzite type.

As the first multi-component oxide semiconductor layer 102, any of thefollowing oxide semiconductor layers can be used: an In—Sn—Ga—Zn—O-basedoxide semiconductor layer which is a four-component metal oxide layer;an In—Ga—Zn—O-based oxide semiconductor layer, an In—Sn—Zn—O-based oxidesemiconductor layer, an In—Al—Zn—O-based oxide semiconductor layer, aSn—Ga—Zn—O-based oxide semiconductor layer, an Al—Ga—Zn—O-based oxidesemiconductor layer, and a Sn—Al—Zn—O-based oxide semiconductor layerwhich are three-component metal oxide layers; an In—Zn—O-based oxidesemiconductor layer, a Sn—Zn—O-based oxide semiconductor layer, anAl—Zn—O-based oxide semiconductor layer, a Zn—Mg—O-based oxidesemiconductor layer, a Sn—Mg—O-based oxide semiconductor layer, and anIn—Mg—O-based oxide semiconductor layer which are two-component metaloxide layers; and the like. In this specification, the multi-componentoxide semiconductor includes an oxide of plural kinds of metals, andn-component metal oxide includes an oxide of n kinds of metals. Notethat the multi-component oxide semiconductor may contain, as animpurity, an element other than the metal oxide that is the maincomponent at 1%, preferably at 0.1%.

The first multi-component oxide semiconductor layer 102 may be formedusing a three-component metal oxide, and an oxide semiconductor materialrepresented by InM_(X)Zn_(Y)O_(Z) (Y=0.5 to 5) may be used. Here, Mrepresents one or more kinds of elements selected from Group 13 elementssuch as gallium (Ga), aluminum (Al), and boron (B). Note that thecontents of In, M, Zn, and O can be set freely, and the case where the Mcontent is zero (that is, x=0) is included. The contents of In and Znare not zero. In other words, the above-described expression includes anIn—Ga—Zn—O-based oxide semiconductor, an In—Zn—O-based oxidesemiconductor, and the like.

Examples of a sputtering method include an RF sputtering method in whicha high-frequency power source is used as a sputtering power source, a DCsputtering method, and a pulsed DC sputtering method in which a bias isapplied in a pulsed manner. An RF sputtering method is mainly used inthe case where an insulating layer is formed, and a DC sputtering methodis mainly used in the case where a metal layer is formed.

As a target used for forming the first multi-component oxidesemiconductor layer 102 by a sputtering method, a metal oxide targetcontaining zinc can be used. For example, a metal oxide targetcontaining In, Ga, and Zn has a composition ratio of In:Ga:Zn=1:x:y (xis greater than or equal to 0, and y is greater than or equal to 0.5 andless than or equal to 5). Specifically, a target having a compositionratio of In:Ga:Zn=1:1:0.5 [atomic ratio], a target having a compositionratio of In:Ga:Zn=1:1:1 [atomic ratio], a target having a compositionratio of In:Ga:Zn=1:1:2 [atomic ratio], or a target having a compositionratio of In:Ga:Zn=1:0.5:2 [atomic ratio] can be used. In thisembodiment, since crystallization is intentionally caused by performingheat treatment in a later step, it is preferable to use a metal oxidetarget by which crystallization is easily caused.

The single-component oxide semiconductor layer 104 is preferably formedusing a single-component oxide semiconductor which can have a wurtzitecrystal structure that is a hexagonal crystal structure by heating,typically, zinc oxide. Here, the single-component oxide semiconductormeans an oxide semiconductor including an oxide of one kind of metal.Note that the single-component oxide semiconductor may contain, as animpurity, an element other than the metal oxide at 1%, preferably at0.1%. The single-component oxide semiconductor is more easilycrystallized than the multi-component oxide semiconductor and the degreeof crystallinity can be high. The single-component oxide semiconductorlayer 104 can be used as a seed crystal for crystal growth of the firstmulti-component oxide semiconductor layer 102 and a secondmulti-component oxide semiconductor layer 106 which is formed later.Therefore, the single-component oxide semiconductor layer 104 may have athickness with which crystal growth is possible, typically greater thanor equal to a thickness of one monoatomic layer and less than or equalto 10 nm, preferably 2 nm to 5 nm inclusive. When the single-componentoxide semiconductor layer 104 is thin, throughput in film formationtreatment and heat treatment can be improved.

The single-component oxide semiconductor layer 104 can be formed by asputtering method in a rare gas (typically argon) atmosphere, an oxygenatmosphere, or an atmosphere containing a rare gas (typically argon) andoxygen.

In addition, in a manner similar to that of the first multi-componentoxide semiconductor layer 102, the relative density of an oxidesemiconductor in a metal oxide target is greater than or equal to 80%,preferably greater than or equal to 95%, more preferably greater than orequal to 99.9%.

Further, in a manner similar to that of the first multi-component oxidesemiconductor layer 102, by forming the single-component oxidesemiconductor layer 104 while heating the substrate, crystal growth canbe promoted in first heat treatment performed later.

Next, the first heat treatment is performed. The temperature of thefirst heat treatment is 500° C. to 1000° C. inclusive, preferably 600°C. to 850° C. inclusive. In addition, heating time is one minute totwenty four hours inclusive.

The first heat treatment is preferably performed in a rare gas(typically, argon) atmosphere, an oxygen atmosphere, a nitrogenatmosphere, a dry air atmosphere, an atmosphere containing a rare gas(typically, argon) and oxygen, or an atmosphere containing a rare gasand nitrogen.

In this embodiment, heat treatment in a dry air atmosphere at 700° C.for one hour is performed as the first heat treatment.

After heating of the single-component oxide semiconductor layer 104 isperformed by gradually increasing the temperature thereof, the firstmulti-component oxide semiconductor layer 102 may be heated at aconstant temperature. When the speed for increasing the temperature froma temperature of higher than or equal to 500° C. is 0.5° C./h to 3° C./hinclusive, crystal growth of the single-component oxide semiconductorlayer 104 is gradually carried out; thus, the crystallinity can befurther enhanced.

A heat treatment apparatus used for the first heat treatment is notlimited to a particular apparatus, and the apparatus may be providedwith a device for heating an object to be processed by heat radiation orheat conduction from a heating element such as a resistance heatingelement. For example, an electric furnace, or a rapid thermal annealing(RTA) apparatus such as a gas rapid thermal annealing (GRTA) apparatusor a lamp rapid thermal annealing (LRTA) apparatus can be used. An LRTAapparatus is an apparatus for heating an object to be processed byradiation of light (an electromagnetic wave) emitted from a lamp such asa halogen lamp, a metal halide lamp, a xenon arc lamp, a carbon arclamp, a high pressure sodium lamp, or a high pressure mercury lamp. AGRTA apparatus is an apparatus for heat treatment using ahigh-temperature gas.

By the first heat treatment, crystal growth begins from the surface ofthe single-component oxide semiconductor layer 104 toward the firstmulti-component oxide semiconductor layer 102 as indicated by arrows inFIG. 2A. Since the single-component oxide semiconductor layer 104 iseasily crystallized, the entire single-component oxide semiconductorlayer 104 is crystallized, so that a single-component oxidesemiconductor layer 105 including single crystal regions is formed. Notethat the single-component oxide semiconductor layer 105 including singlecrystal regions has a wurtzite crystal structure that is a hexagonalcrystal structure (see FIG. 2B).

By the first heat treatment, crystal growth is carried out from thesurface of the single-component oxide semiconductor layer 104 to formsingle crystal regions. Each of the single crystal regions is aplate-shaped crystal region obtained by crystal growth from the surfaceto the inside and has an average thickness of greater than or equal to athickness of one atomic layer and less than or equal to 10 nm,preferably 2 nm to 5 nm inclusive. Each of the single crystal regionshas the a-b plane parallel to the surface and the c-axis perpendicularto the surface. In this embodiment, most part of the single-componentoxide semiconductor layer 104 is made to contain crystals (also referredto as a co-growing (CG) crystal) by the first heat treatment. Sincecrystal growth is carried out from the surface in a depth direction,single crystal regions having relatively uniform crystal direction withrespect to the surface of the single-component oxide semiconductor layer104 can be formed without being influenced by a base component.

By performing the first heat treatment continuously, crystal growth ofthe first multi-component oxide semiconductor layer 102 proceeds towardthe substrate 100 using the single-component oxide semiconductor layer105 including single crystal regions as a seed crystal, as indicated byarrows. The single-component oxide semiconductor layer 105 includingsingle crystal regions is c-axis aligned perpendicularly to the surface.By using the single-component oxide semiconductor layer 105 includingsingle crystal regions as a seed crystal, crystal growth (epitaxialgrowth or axial growth) of the first multi-component oxide semiconductorlayer 102 can be carried out such that substantially the same crystalaxis as the single-component oxide semiconductor layer 105 includingsingle crystal regions is obtained. That is, crystal growth can becarried out while the first multi-component oxide semiconductor layer102 is c-axis aligned. As a result, a first multi-component oxidesemiconductor layer 103 including single crystal regions which is c-axisaligned can be formed. The first multi-component oxide semiconductorlayer 103 including single crystal regions has a hexagonal crystalstructure which is not a wurtzite crystal structure (see FIG. 2C).

For example, in the case where an In—Ga—Zn—O-based oxide semiconductormaterial is used for the first multi-component oxide semiconductor layerincluding single crystal regions, the first multi-component oxidesemiconductor layer including single crystal regions can include acrystal represented by InGaO₃(ZnO)_(m) such as InGaZnO₄ or InGaZn₅O₈, acrystal represented by In₂Ga₂ZnO₇, or the like. Such a crystal has ahexagonal crystal structure and its c-axis is substantiallyperpendicular to the surface of the single-component oxide semiconductorlayer through the first heat treatment.

Next, as illustrated in FIG. 2D, the second multi-component oxidesemiconductor layer 106 is formed over the single-component oxidesemiconductor layer 105 including single crystal regions. The secondmulti-component oxide semiconductor layer 106 can have a non-wurtzitecrystal structure that is a hexagonal crystal structure by heating. Thesecond multi-component oxide semiconductor layer 106 can be formed by amethod similar to that of the single-component oxide semiconductor layer104. Note that the thickness of the second multi-component oxidesemiconductor layer 106 may be determined as appropriate in accordancewith a device to be manufactured, by a practitioner. For example, thetotal thickness of the first multi-component oxide semiconductor layer102, the single-component oxide semiconductor layer 104, and the secondmulti-component oxide semiconductor layer 106 is 10 nm to 200 nminclusive.

The second multi-component oxide semiconductor layer 106 can be formedusing a material and a method which are similar to those of the firstmulti-component oxide semiconductor layer 102 as appropriate.

Next, second heat treatment is performed. The temperature of the secondheat treatment is 100° C. to 500° C. inclusive, preferably 150° C. to400° C. inclusive. The heating time is set to 1 minute to 100 hoursinclusive, preferably 5 hours to 20 hours inclusive, typically 10 hours.

Note that the second heat treatment can be performed in an atmospheresimilar to that of the first heat treatment. In addition, a heatingapparatus similar to that of the first heat treatment can be used asappropriate for the second heat treatment.

By performing the second heat treatment, crystal growth begins from thesingle-component oxide semiconductor layer 105 including single crystalregions toward the surface of the second multi-component oxidesemiconductor layer 106 as indicated by arrows in FIG. 2D. Thesingle-component oxide semiconductor layer 105 including single crystalregions is c-axis aligned perpendicularly to the surface. By using thesingle-component oxide semiconductor layer 105 including single crystalregions as a seed crystal, crystal growth (epitaxial growth or axialgrowth) of the second multi-component oxide semiconductor layer 106 canbe carried out such that substantially the same crystal axis as thesingle-component oxide semiconductor layer 105 including single crystalregions is obtained, in a manner similar to that of the firstmulti-component oxide semiconductor layer 102. That is, crystal growthcan be carried out while the second multi-component oxide semiconductorlayer 106 is c-axis aligned. Through the above process, a secondmulti-component oxide semiconductor layer 107 including single crystalregions can be formed. The second multi-component oxide semiconductorlayer 107 including single crystal regions has a hexagonal crystalstructure which is not a wurtzite crystal structure (see FIG. 2E).

For example, in the case where an In—Ga—Zn—O-based oxide semiconductormaterial is used for the second multi-component oxide semiconductorlayer including single crystal regions, the second multi-component oxidesemiconductor layer including single crystal regions can include acrystal represented by InGaO₃(ZnO)_(m) such as InGaZnO₄ or InGaZn₅O₈, acrystal represented by In₂Ga₂ZnO₇, or the like. Such a crystal has ahexagonal crystal structure and its c-axis is substantiallyperpendicular to the surface of the second multi-component oxidesemiconductor layer through the second heat treatment.

Here, a crystal in which the c-axis is substantially perpendicular tothe surface of the first multi-component oxide semiconductor layer 102and the second multi-component oxide semiconductor layer 106 has astacked structure of layers containing any of In, Ga, and Zn, parallelto the a-axis and b-axis. Specifically, a crystal of In₂Ga₂ZnO₇,InGaZnO₄, or InGaZn₅O₈ has a structure in which a layer that contains Inand a layer that does not contain In (a layer that contains Ga or Zn)are stacked in the c-axis direction.

In the In—Ga—Zn—O-based oxide semiconductor, the conductivity of a layerthat contains In in a direction of the a-b plane is favorable. This isdue to the fact that electrical conductivity is mainly controlled by Inin the In—Ga—Zn—O-based oxide semiconductor and the fact that the 5sorbital of one In atom overlaps with the 5s orbital of an adjacent Inatom and thereby a carrier path is formed. Further, since the transistordescribed in this embodiment includes the first multi-component oxidesemiconductor layer including single crystal regions, thesingle-component oxide semiconductor layer including single crystalregions, and the second multi-component oxide semiconductor layerincluding single crystal regions which are highly crystallized, thetransistor has fewer impurities and defects than a transistor includingan amorphous, microcrystalline, or polycrystalline oxide semiconductorlayer. As described above, carrier mobility of the first multi-componentoxide semiconductor layer including single crystal regions, thesingle-component oxide semiconductor layer including single crystalregions, and the second multi-component oxide semiconductor layerincluding single crystal regions can be improved, whereby on-statecurrent and field-effect mobility of the transistor can be enhanced.

Here, an interface between the first multi-component oxide semiconductorlayer 103 including single crystal regions and the single-componentoxide semiconductor layer 105 including single crystal regions and aninterface between the single-component oxide semiconductor layer 105including single crystal regions and the second multi-component oxidesemiconductor layer 107 including single crystal regions are denoted bydotted lines. However, when the single-component oxide semiconductorlayer 105 including single crystal regions is ZnO and the firstmulti-component oxide semiconductor layer 103 including single crystalregions and the second multi-component oxide semiconductor layer 107including single crystal regions are an In—Ga—Zn—O-based oxidesemiconductor, zinc contained in ZnO or the In—Ga—Zn—O-based oxidesemiconductor is diffused due to the pressure and temperature of theheat treatment. Diffusion of zinc is recognized because, when TDS isperformed at a temperature up to 450° C., a peak of In or Ga is notdetected but a peak of zinc is detected particularly at around 300° C.under vacuum heating conditions. Note that TDS is performed in vacuum,and it is found that zinc is detected from a temperature of about 200°C. Accordingly, as illustrated in FIG. 3, there is also the case where aboundary between the first multi-component oxide semiconductor layerincluding single crystal regions and the single-component oxidesemiconductor layer including single crystal regions and a boundarybetween the single-component oxide semiconductor layer including singlecrystal regions and the second multi-component oxide semiconductor layerincluding single crystal regions are not clear and these layers can beregarded as one layer, i.e., a layer 109.

Through the above process, the first multi-component oxide semiconductorlayer 103 including single crystal regions, the single-component oxidesemiconductor layer 105 including single crystal regions, and the secondmulti-component oxide semiconductor layer 107 including single crystalregions can be formed.

Now, a mechanism for forming the plate-shaped crystal regions in thesingle-component oxide semiconductor layer 104 through the first heattreatment will be described with reference to FIG. 4, FIGS. 5A to 5C,and FIGS. 6A and 6B.

Motion of atoms in the first heat treatment was examined by a classicalmolecular dynamics method. An empirical potential which characterizesthe interaction between atoms is defined in a classical moleculardynamics method, so that force that acts on each atom can be evaluated.Here, a law of classical mechanics was applied to each atom and Newton'sequation of motion was numerically solved, whereby motion(time-dependent change) of each atom was examined. In this calculation,a Born-Mayer-Huggins potential was used as the empirical potential.

A model in which crystal nuclei 160 that are single crystal zinc oxide(hereinafter referred to as c-ZnO) having a width of 1 nm are providedat equal intervals in amorphous zinc oxide (hereinafter referred to asa-ZnO) was formed as illustrated in FIG. 4. Note that the density ofa-ZnO and c-ZnO was 5.5 g/cm³. The vertical direction was a c-axisdirection.

Next, the model in FIG. 4 was subjected to classical molecular dynamicssimulation at 700° C. for 100 psec (0.2 fsec×500,000 steps) while fixingc-ZnO under three-dimensional periodic boundary conditions. Resultsthereof are shown in FIGS. 5A to 5C and FIGS. 6A and 6B.

FIGS. 5A, 5B, and 5C respectively show the changes of atomic positionsafter 20 psec, 40 psec, and 60 psec. FIGS. 6A and 6B respectively showthe changes of atomic positions after 80 psec and 100 psec. In eachdrawing, the distance and direction of crystal growth are denoted by thelength and pointing direction of arrows.

Table 1 shows crystal growth rates in a vertical direction (c-axis[0001]) and a horizontal direction perpendicular to the verticaldirection.

TABLE 1 Direction Crystal growth rates (nm/psec) Vertical 6.1 × 10⁻³Horizontal 3.0 × 10⁻²

In FIGS. 5A to 5C, arrows 164 a, 164 b, 168 a, 168 b, 172 a, and 172 bin a horizontal direction (a direction perpendicular to a c-axisdirection) are longer than arrows 162, 166, and 170 in a verticaldirection (the c-axis direction). Therefore, it is found that crystalgrowth in a horizontal direction is preferential and that the crystalgrowth is finished between adjacent crystal nuclei in FIG. 5C.

In FIGS. 6A and 6B, it is found that crystal growth is carried out in avertical direction (the c-axis direction) using crystal regions formedat the surface as seed crystals as indicated by arrows 174 and 176.

In addition, according to Table 1, it is found that the crystal growthrate in the horizontal direction perpendicular to the vertical direction(c-axis [0001]) is about 4.9 times higher than that in the verticaldirection. Therefore, crystal growth first proceeds in a directionparallel to the surface (the a-b plane) in ZnO. At this time, in the a-bplane, crystal growth proceeds in the horizontal direction to formplate-shaped single crystal regions. Next, using the plate-shaped singlecrystal regions formed at the surface (the a-b plane) as seed crystals,crystal growth proceeds in the c-axis direction perpendicular to thesurface (the a-b plane). Therefore, it is assumed that ZnO is likely tobe c-axis aligned. As described above, after the crystal growthpreferentially proceeds in the direction parallel to the surface (thea-b plane), crystal growth (also referred to as epitaxial growth oraxial growth) proceeds in the c-axis direction perpendicularly to thesurface, whereby the plate-shaped single crystal regions are formed.

Next, a mechanism of crystal growth in which the crystal axis of thefirst multi-component oxide semiconductor layer 103 including singlecrystal regions and the crystal axis of the second multi-component oxidesemiconductor layer 107 including single crystal regions aresubstantially equal to the crystal axis of the single-component oxidesemiconductor layer 105 including single crystal regions is describedwith reference to FIGS. 7A to 7C.

FIG. 7A shows the structure of a unit cell in the a-b plane in whichzinc oxide (ZnO) having a hexagonal crystal structure that is a typicalexample of the single-component oxide semiconductor layer is observedfrom the c-axis direction. FIG. 7B shows the crystal structure in whichthe c-axis direction is a vertical direction.

FIG. 7C shows the structure in the a-b plane in which InGaZnO₄ that is atypical example of the first multi-component oxide semiconductor layerand the second multi-component oxide semiconductor layer is observedfrom the c-axis direction.

According to FIGS. 7A and 7C, lattice constants of ZnO and InGaZnO₄ aresubstantially the same, and ZnO and InGaZnO₄ have high consistency witheach other in the a-b plane. In addition, ZnO and InGaZnO₄ have ahexagonal crystal structure and ZnO has a bond parallel to the c-axisdirection; therefore, crystal growth can be carried out in the c-axisdirection with high consistency in InGaZnO₄ that is a typical example ofthe first multi-component oxide semiconductor layer and the secondmulti-component oxide semiconductor layer. Accordingly, crystal growthis carried out such that the crystal axis of the first multi-componentoxide semiconductor layer 103 including single crystal regions and thecrystal axis of the second multi-component oxide semiconductor layer 107including single crystal regions are substantially equal to the crystalaxis of the single-component oxide semiconductor layer 105 includingsingle crystal regions.

Through the above steps, a stack having the first multi-component oxidesemiconductor layer including single crystal regions, thesingle-component oxide semiconductor layer including single crystalregions, and the second multi-component oxide semiconductor layerincluding single crystal regions can be formed without being influencedby a material of the substrate which serves as a base.

Then, a resist mask is formed by a photolithography step over the secondmulti-component oxide semiconductor layer 107 including single crystalregions illustrated in FIG. 2E. After that, the first multi-componentoxide semiconductor layer 103 including single crystal regions, thesingle-component oxide semiconductor layer 105 including single crystalregions, and the second multi-component oxide semiconductor layer 107including single crystal regions are etched by using the resist mask,whereby the island-shaped first multi-component oxide semiconductorlayer 103 a including single crystal regions, the island-shapedsingle-component oxide semiconductor layer 105 a including singlecrystal regions, and the island-shaped second multi-component oxidesemiconductor layer 107 a including single crystal regions are formed.The first multi-component oxide semiconductor layer 103 a includingsingle crystal regions, the single-component oxide semiconductor layer105 a including single crystal regions, and the second multi-componentoxide semiconductor layer 107 a including single crystal regions arealso referred to as an oxide semiconductor stack 110 (see FIG. 1).

Next, after a conductive layer is formed over the oxide semiconductorstack 110, the conductive layer is etched into a desired shape, wherebythe wirings 108 a and 108 b are formed.

The wirings 108 a and 108 b can be formed using a metal element selectedfrom aluminum, chromium, copper, tantalum, titanium, molybdenum, andtungsten, an alloy containing any of these metal elements as acomponent, an alloy containing any of these metal elements incombination, or the like. Alternatively, one or more metal elementsselected from manganese, magnesium, zirconium, and beryllium may beused. In addition, the wirings 108 a and 108 b can have a single-layerstructure or a stacked structure having two or more layers. For example,a single-layer structure of an aluminum layer containing silicon, atwo-layer structure in which a titanium layer is stacked over analuminum layer, a two-layer structure in which a titanium layer isstacked over a titanium nitride layer, a two-layer structure in which atungsten layer is stacked over a titanium nitride layer, a two-layerstructure in which a tungsten layer is stacked over a tantalum nitridelayer, a three-layer structure in which a titanium layer, an aluminumlayer, and a titanium layer are stacked in this order, and the like canbe given. Alternatively, a layer, an alloy layer, or a nitride layerwhich contains aluminum and one or more of elements selected fromtitanium, tantalum, tungsten, molybdenum, chromium, neodymium, andscandium may be used.

Alternatively, as the wirings 108 a and 108 b, a light-transmittingconductive material such as indium tin oxide, indium oxide containingtungsten oxide, indium zinc oxide containing tungsten oxide, indiumoxide containing titanium oxide, indium tin oxide containing titaniumoxide, indium zinc oxide, or indium tin oxide to which silicon oxide isadded, can be used. It is also possible to have a stacked structureformed using the above light-transmitting conductive material and theabove metal element.

Next, the gate insulating layer 112 is formed over the oxidesemiconductor stack 110, and the wirings 108 a and 108 b.

The gate insulating layer 112 can be formed with a single layer or astacked layer using one or more of a silicon oxide layer, a siliconnitride layer, a silicon oxynitride layer, a silicon nitride oxidelayer, and an aluminum oxide layer. A portion of the gate insulatinglayer 112 which is in contact with the oxide semiconductor stack 110preferably contains oxygen, and in particular, the portion of the gateinsulating layer 112 is preferably formed using a silicon oxide layer.The use of a silicon oxide layer makes it possible to supply oxygen tothe oxide semiconductor stack 110; thus, favorable characteristics canbe obtained.

When the gate insulating layer 112 is formed using a high-k materialsuch as hafnium silicate (HfSiO_(x)), hafnium silicate to which nitrogenis added (HfSi_(x)O_(y)N_(z)), hafnium aluminate to which nitrogen isadded (HfAl_(x)O_(y)N_(z)), hafnium oxide, or yttrium oxide, gateleakage current can be reduced. Further, a stacked structure in which ahigh-k material and one or more of a silicon oxide layer, a siliconnitride layer, a silicon oxynitride layer, a silicon nitride oxidelayer, and an aluminum oxide layer are stacked can be used. Thethickness of the gate insulating layer 112 may be 50 nm to 500 nminclusive. When the thickness of the gate insulating layer 112 is large,gate leakage current can be reduced.

Next, the gate electrode 114 is formed over the gate insulating layer112 in a region overlapping with the oxide semiconductor stack 110.

The gate electrode 114 can be formed using a metal element selected fromaluminum, chromium, copper, tantalum, titanium, molybdenum, andtungsten, an alloy containing any of these metal elements as acomponent, an alloy containing any of these metal elements incombination, or the like. Alternatively, one or more metal elementsselected from manganese, magnesium, zirconium, and beryllium may beused. Further, the gate electrode 114 may have a single-layer structureor a stacked-layer structure of two or more layers. For example, asingle-layer structure of an aluminum layer containing silicon, atwo-layer structure in which a titanium layer is stacked over analuminum layer, a two-layer structure in which a titanium layer isstacked over a titanium nitride layer, a two-layer structure in which atungsten layer is stacked over a titanium nitride layer, a two-layerstructure in which a tungsten layer is stacked over a tantalum nitridelayer, a three-layer structure in which a titanium layer, an aluminumlayer, and a titanium layer are stacked in this order, and the like canbe given. Alternatively, a layer, an alloy layer, or a nitride layerwhich contains aluminum and one or more elements selected from titanium,tantalum, tungsten, molybdenum, chromium, neodymium, and scandium may beused.

Alternatively, a light-transmitting conductive material such as indiumtin oxide, indium oxide containing tungsten oxide, indium zinc oxidecontaining tungsten oxide, indium oxide containing titanium oxide,indium tin oxide containing titanium oxide, indium zinc oxide, or indiumtin oxide to which silicon oxide is added, can be used as the gateelectrode 114. It is also possible to have a stacked structure formedusing the above light-transmitting conductive material and the abovemetal element.

After that, the insulating layer 116 may be formed as a protectivelayer. Through the above steps, the transistor 150 having the oxidesemiconductor stack including single crystal regions for a channelformation region can be formed. Although any metal oxide which has beenalready reported is in an amorphous state or a polycrystalline state orcan be in a single crystal state only by a treatment at a temperature ashigh as around 1400° C., a transistor which has an oxide semiconductorincluding single crystal regions for a channel formation region can beformed with the use of a large-area substrate at a relatively lowtemperature by the above-described method in which a single-componentoxide semiconductor layer including a flat-plate-shaped single crystalregion is formed and then crystal growth is carried out with the use ofthe single crystal regions as a seed crystal.

Embodiment 2

In this embodiment, a manufacturing method of a transistor including ahighly purified oxide semiconductor stack will be described as amanufacturing method of a semiconductor device according to anembodiment of the invention disclosed herein with reference to FIGS. 8Ato 8E, FIGS. 9A to 9D, and FIGS. 10A and 10B.

An insulating layer 101 is formed over a substrate 100. Then, in amanner similar to that in Embodiment 1, a first multi-component oxidesemiconductor layer 102 is formed over the insulating layer 101, and asingle-component oxide semiconductor layer 104 is formed over the firstmulti-component oxide semiconductor layer 102 (see FIG. 8A).

As the substrate 100, the substrate 100 described in Embodiment 1 can beused as appropriate.

The insulating layer 101 is provided so as to reduce entry of animpurity into a layer formed over the substrate 100 and to enhanceadhesion to the layer formed over the substrate 100. The insulatinglayer 101 is formed using an oxide insulating layer such as a siliconoxide layer or a silicon oxynitride layer, or a nitride insulating layersuch as a silicon nitride layer, a silicon nitride oxide layer, analuminum nitride layer, or an aluminum nitride oxide layer. In addition,the insulating layer 101 may have a stacked structure, for example, astacked structure in which one or more of the above nitride insulatinglayers and one or more of the above oxide insulating layers are stackedin that order over the substrate 100. There is no particular limitationon the thickness of the insulating layer 101; the insulating layer 101can have a thickness of 10 nm to 500 nm inclusive, for example. Theinsulating layer 101 is not an essential component; therefore, astructure in which the insulating layer 101 is not provided is alsopossible.

The insulating layer 101 can be formed by a sputtering method, a CVDmethod, a coating method, a printing method, or the like.

Note that when the insulating layer 101 is formed by a sputteringmethod, the insulating layer 101 is preferably formed while hydrogen,water, hydroxyl group, hydride, or the like remaining in a treatmentchamber is removed. This is for preventing hydrogen, water, hydroxylgroup, hydride, or the like from being contained in the insulating layer101. It is preferable to use an entrapment vacuum pump in order toremove hydrogen, water, hydroxyl group, hydride, or the like remainingin the treatment chamber. As the entrapment vacuum pump, for example, acryopump, an ion pump, or a titanium sublimation pump is preferablyused. In addition, an evacuation unit may be a turbo pump provided witha cold trap. Hydrogen, water, hydroxyl group, hydride, or the like isremoved from the treatment chamber which is evacuated with a cryopump;thus, when the insulating layer 101 is formed in the treatment chamber,the concentration of impurities contained in the insulating layer 101can be reduced.

In addition, it is preferable to use a high-purity gas from whichimpurities such as hydrogen, water, hydroxyl group, or hydride areremoved to a concentration of several ppm or several ppb, as asputtering gas when the insulating layer 101 is formed.

In this embodiment, the substrate 100 is transferred to the treatmentchamber, a sputtering gas containing high-purity oxygen, from whichhydrogen, water, hydroxyl group, hydride, or the like is removed, isintroduced into the treatment chamber, and a silicon oxide layer isformed as the insulating layer 101 over the substrate 100 using asilicon target. Note that when the insulating layer 101 is formed, thesubstrate 100 may be heated.

When the first multi-component oxide semiconductor layer 102 and thesingle-component oxide semiconductor layer 104 are formed by asputtering method, by heating the substrate, impurities such ashydrogen, water, hydroxyl group, or hydride contained in the firstmulti-component oxide semiconductor layer 102 and the single-componentoxide semiconductor layer 104 can be reduced, and crystal growth can bepromoted in first heat treatment performed later.

The relative density of a metal oxide in a metal oxide target is greaterthan or equal to 80%, preferably greater than or equal to 95%, morepreferably greater than or equal to 99.9%. By using a target having highrelative density, the impurity concentration in the firstmulti-component oxide semiconductor layer 102 and the single-componentoxide semiconductor layer 104 which are formed can be reduced, and atransistor having excellent electric characteristics or high reliabilitycan be obtained.

Preheat treatment is preferably performed before the firstmulti-component oxide semiconductor layer 102 and the single-componentoxide semiconductor layer 104 are formed, in order to remove hydrogen,water, hydroxyl group, hydride, or the like which remains on the innerwall of the sputtering apparatus, on a surface of a target, or inside atarget material. As the preheat treatment, a method in which the insideof the chamber is heated to 200° C. to 600° C. under reduced pressure, amethod in which introduction and removal of nitrogen or an inert gas arerepeated, and the like can be given. After the preheat treatment, thesubstrate or the sputtering apparatus is cooled. Then, the firstmulti-component oxide semiconductor layer 102 and the single-componentoxide semiconductor layer 104 are formed without exposure to the air. Inthis case, not water but oil or the like is preferably used as a coolantfor the target. Although a certain level of effect can be obtained whenintroduction and removal of nitrogen or an inert gas are repeatedwithout performing heating, it is more preferable to perform the abovetreatment while performing heating.

In addition, in a manner similar to that of the insulating layer 101,hydrogen, water, hydroxyl group, hydride, or the like remaining in thesputtering apparatus is preferably removed before, during, or after theformation of the first multi-component oxide semiconductor layer 102 andthe single-component oxide semiconductor layer 104. In order to removeresidual moisture from the sputtering apparatus, an entrapment vacuumpump is preferably used. As a result, hydrogen, water, hydroxyl group,hydride, or the like is removed, so that the concentration of impuritiescontained in the first multi-component oxide semiconductor layer 102 andthe single-component oxide semiconductor layer 104 can be reduced.

Next, in a manner similar to that in Embodiment 1, first heat treatmentis performed. The temperature of the first heat treatment is 500° C. to1000° C. inclusive, preferably 600° C. to 850° C. inclusive. Inaddition, heating time is one minute to twenty four hours inclusive.Through the first heat treatment, a first multi-component oxidesemiconductor layer 103 including single crystal regions and asingle-component oxide semiconductor layer 105 including single crystalregions can be formed (see FIG. 8B).

In the first heat treatment, not only is crystal growth carried out inthe first multi-component oxide semiconductor layer 102 and thesingle-component oxide semiconductor layer 104 but impurities that arenot main components of the oxide semiconductor, typically, hydrogen,water, hydroxyl group, or hydride are removed, so that the oxidesemiconductor layers can be highly purified.

The first heat treatment is preferably performed in a rare gas(typically, argon) atmosphere, an oxygen atmosphere, a nitrogenatmosphere, a dry air atmosphere, an atmosphere containing a rare gas(typically, argon) and oxygen, or an atmosphere containing a rare gasand nitrogen. Specifically, a high-purity gas atmosphere is preferablyused, in which the concentration of impurities such as hydrogen, water,hydroxyl group, or hydride are reduced to several ppm or several ppb.

In this embodiment, heat treatment in a dry air atmosphere at 700° C.for one hour is performed as the first heat treatment.

Next, in a manner similar to that in Embodiment 1, a secondmulti-component oxide semiconductor layer 106 is formed over thesingle-component oxide semiconductor layer 105 including single crystalregions.

Next, in a manner similar to that in Embodiment 1, second heat treatmentis performed. Through the second heat treatment, a secondmulti-component oxide semiconductor layer 107 including single crystalregions can be formed (see FIG. 8C).

In the second heat treatment, not only is crystal growth carried out inthe second multi-component oxide semiconductor layer 106, but impuritiesthat are not main components of the oxide semiconductor, typically,hydrogen, water, hydroxyl group, or hydride are removed, so that theoxide semiconductor layer can be highly purified.

At the time of increasing the temperature in the first heat treatmentand the second heat treatment, an atmosphere in a furnace may be anitrogen atmosphere, and the atmosphere may be switched to an oxygenatmosphere at the time of performing cooling. The inside of the firstmulti-component oxide semiconductor layer 102, the single-componentoxide semiconductor layer 104, and the second multi-component oxidesemiconductor layer 106 can be supplied with oxygen so as to be i-typeoxide semiconductor layers by switching the nitrogen atmosphere in whichdehydration or dehydrogenation is performed to the oxygen atmosphereafter the dehydration or dehydrogenation.

Through the above process, the first multi-component oxide semiconductorlayer 103 including single crystal regions, the single-component oxidesemiconductor layer 105 including single crystal regions, and the secondmulti-component oxide semiconductor layer 107 including single crystalregions can be formed (see FIG. 8C).

Then, a resist mask is formed by a photolithography step over the secondmulti-component oxide semiconductor layer 107 including single crystalregions. After that, the first multi-component oxide semiconductor layer103 including single crystal regions, the single-component oxidesemiconductor layer 105 including single crystal regions, and the secondmulti-component oxide semiconductor layer 107 including single crystalregions are etched by using the resist mask, whereby a firstmulti-component oxide semiconductor layer 103 a including single crystalregions, a single-component oxide semiconductor layer 105 a includingsingle crystal regions, and a second multi-component oxide semiconductorlayer 107 a including single crystal regions which have an island-shapeare formed (see FIG. 8D). The resist mask may be formed by an ink-jetmethod. Formation of the resist mask by an ink-jet method needs nophotomask; thus, manufacturing cost can be reduced. Hereinafter, thefirst multi-component oxide semiconductor layer 103 a including singlecrystal regions, the single-component oxide semiconductor layer 105 aincluding single crystal regions, and the second multi-component oxidesemiconductor layer 107 a including single crystal regions are alsoreferred to as an oxide semiconductor stack 110.

In the etching, a dry etching method or a wet etching method can beused. As an etchant used for wet etching, a solution obtained by mixingphosphoric acid, acetic acid, and nitric acid, an ammonia hydrogenperoxide (hydrogen peroxide at 31 wt %: ammonia water at 28 wt %:water=5:2:2), or the like can be used. In addition, ITO07N (produced byKANTO CHEMICAL CO., INC.) may be used.

The etchant after the wet etching is removed together with the materialetched off by cleaning. The waste liquid including the etchant and thematerial etched off may be purified and the material may be reused. Whena material such as indium is collected from the waste liquid after theetching and reused, the resources can be efficiently used and the costcan be reduced.

As an etching gas for dry etching, a gas containing chlorine(chlorine-based gas such as chlorine (Cl₂), boron trichloride (BCl₃),silicon tetrachloride (SiCl₄), or carbon tetrachloride (CCl₄)) ispreferably used.

Alternatively, a gas containing fluorine (fluorine-based gas such ascarbon tetrafluoride (CF₄), sulfur hexafluoride (SF₆), nitrogentrifluoride (NF₃), or trifluoromethane (CHF₃)); hydrogen bromide (HBr);oxygen (O₂); any of these gases to which a rare gas such as helium (He)or argon (Ar) is added; or the like can be used.

As a dry etching method, a parallel plate RIE (reactive ion etching)method or an ICP (inductively coupled plasma) etching method can beused. In order to etch the layer into a desired shape, the etchingcondition (the amount of electric power applied to a coil-shapedelectrode, the amount of electric power applied to an electrode on asubstrate side, the temperature of the electrode on the substrate side,or the like) is adjusted as appropriate.

Next, a conductive layer 108 is formed over the insulating layer 101 andthe island-shaped oxide semiconductor layers (see FIG. 8E). Theconductive layer 108 is formed into wirings 108 a and 108 b later.

The conductive layer 108 can be formed using a material which is usedfor the wirings 108 a and 108 b described in Embodiment 1 asappropriate. The conductive layer 108 is formed by a sputtering method,a CVD method, or a vacuum evaporation method. In this embodiment, as theconductive layer 108, a metal layer including three layers of a titaniumlayer with a thickness of 50 nm, an aluminum layer with a thickness of100 nm, and a titanium layer with a thickness of 50 nm, each formed by asputtering method, is used.

Next, a resist mask is formed over the conductive layer 108 by aphotolithography step, and the conductive layer 108 is etched with theuse of the resist mask, so that the wirings 108 a and 108 b functioningas a source electrode and a drain electrode are formed (see FIG. 9A).Alternatively, when the wirings 108 a and 108 b are formed by a printingmethod or an ink-jet method without using a photolithography step, thenumber of steps can be reduced.

In light exposure performed on a resist for forming a resist mask thatis used in etching, it is preferable to use ultraviolet light, a KrFlaser beam, or an ArF laser beam. Particularly for light exposure in thecase where the channel length (L) is shorter than 25 nm, a resist ispreferably exposed to extreme ultraviolet light whose wavelength isseveral nanometers to several tens of nanometers, which is extremelyshort. In light exposure using extreme ultraviolet light, resolution ishigh and the depth of focus is large. Therefore, the channel length (L)of a transistor, which is formed later, can be 10 nm to 1000 nm (1 μm)inclusive. By a decrease in channel length by such a method, operationspeed of the transistor can be improved. In addition, off-state currentof a transistor including the above-described oxide semiconductor isvery small; thus, an increase in power consumption due tominiaturization of the transistor can be suppressed.

The material of the oxide semiconductor stack 110 and the material andetching conditions of the conductive layer 108 are adjusted asappropriate so that the oxide semiconductor stack 110 is not removed atthe time of etching the conductive layer 108. Note that in some cases,the oxide semiconductor stack 110 is partly etched in the etching stepand thus has a groove portion (a recessed portion) depending on thematerials and the etching conditions.

In addition, a crystal region on the side surface of the oxidesemiconductor stack 110 which is in contact with the wiring 108 a or 108b is in an amorphous state in some cases.

Note that the etching of the conductive layer 108 may be performed usingeither dry etching or wet etching, or using both dry etching and wetetching. In order to form the wirings 108 a and 108 b having a desiredshape, an etching condition (etchant, etching time, temperature, or thelike) is adjusted as appropriate in accordance with the material.

In this embodiment, ammonia hydrogen peroxide (a mixed solution ofammonia, water, and hydrogen peroxide) is used as an etchant and theconductive layer 108 is etched, so that the wirings 108 a and 108 b areformed.

Next, as illustrated in FIG. 9B, a gate insulating layer 112 is formedover the insulating layer 101, the oxide semiconductor stack 110, andthe wirings 108 a and 108 b, in a manner similar to that in Embodiment1.

The i-type or substantially i-type oxide semiconductor layer (the highlypurified oxide semiconductor layer whose hydrogen concentration isreduced) obtained by removal of impurities is extremely sensitive to aninterface state and interface electric charge; therefore, the interfacebetween the oxide semiconductor stack and the gate insulating layer 112is important. Thus, the gate insulating layer 112 that is to be incontact with the highly purified oxide semiconductor stack 110 needs tohave high quality.

For example, high-density plasma CVD using microwaves (e.g., with afrequency of 2.45 GHz) is preferably adopted because an insulating layerformed can be dense and have high withstand voltage and high quality.When the highly purified oxide semiconductor layer whose hydrogenconcentration is reduced and the high-quality gate insulating layer arein close contact with each other, the interface state can be reduced andthe interface characteristics can be favorable. In addition, since theinsulating layer formed using high-density plasma CVD can have a uniformthickness, the insulating layer has excellent step coverage. Further, asfor the insulating layer formed using high-density plasma CVD, thethickness can be controlled precisely.

It is needless to say that other film formation methods such as asputtering method or a plasma CVD method can be employed as long as ahigh-quality insulating layer can be formed as the gate insulatinglayer. When a silicon oxide layer is formed by a sputtering method, asilicon target or a quartz target is used as a target, and oxygen or amixed gas of oxygen and argon is used as a sputtering gas. In addition,as the gate insulating layer, an insulating layer whose characteristicsof an interface with the oxide semiconductor stack 110 are improved orwhose film quality is improved by heat treatment after the formation maybe used. In any case, an insulating layer which can reduce the interfacestate density with the oxide semiconductor stack 110 and can form afavorable interface, in addition to having good film quality as the gateinsulating layer, may be used.

For example, in a gate bias-temperature stress test (BT test) at 85° C.at 2×10⁶ V/cm for 12 hours, when impurities are added to the oxidesemiconductor stack 110, bonds between impurities and a main componentof the oxide semiconductor stack 110 are cut by an intense electricfield (B: bias) and high temperature (T: temperature), and generateddangling bonds cause a shift in threshold voltage (Vth).

On the other hand, when impurities in the oxide semiconductor stack 110,in particular, hydrogen, water, hydroxyl group, hydride, or the like,are removed as much as possible, and characteristics of an interfacebetween the oxide semiconductor stack and the gate insulating layer areimproved as described above, a transistor which is stable to the BT testcan be obtained.

Note that a halogen element (e.g. fluorine or chlorine) may be containedin an insulating layer provided in contact with the oxide semiconductorstack 110, or a halogen element may be contained in the oxidesemiconductor stack 110 by plasma treatment in a gas atmospherecontaining a halogen element in a state that the oxide semiconductorstack 110 is exposed, whereby impurities such as hydrogen, water,hydroxyl group, or hydride existing in the oxide semiconductor stack 110or at the interface between the oxide semiconductor stack 110 and theinsulating layer which is provided in contact with the oxidesemiconductor stack 110 may be removed. When the insulating layer ismade to contain a halogen element, the halogen element concentration inthe insulating layer may be approximately 5×10¹⁷ cm⁻³ to 1×10²⁰ cm⁻³.

As described above, in the case where a halogen element is contained inthe oxide semiconductor stack 110 or at the interface between the oxidesemiconductor stack 110 and the insulating layer which is in contactwith the oxide semiconductor stack 110 and the insulating layer which isprovided in contact with the oxide semiconductor stack 110 is an oxideinsulating layer, the side of the oxide insulating layer which is not incontact with the oxide semiconductor stack 110 is preferably coveredwith a nitride insulating layer. That is, a silicon nitride layer or thelike may be provided on and in contact with the oxide insulating layerwhich is in contact with the oxide semiconductor stack 110. With such astructure, entry of an impurity such as hydrogen, water, hydroxyl group,or hydride into the oxide semiconductor stack 110 can be reduced.

Further, preheat treatment is preferably performed before the gateinsulating layer 112 is formed in order to remove moisture or hydrogenwhich remains on the inner wall of the sputtering apparatus, on asurface of a target, or inside a target material. After the preheattreatment, the substrate or the sputtering apparatus is cooled. Then,the gate insulating layer 112 is formed without exposure to the air.

Next, a gate electrode 114 is formed over the gate insulating layer 112in a region overlapping with the oxide semiconductor stack 110 (see FIG.9C). The gate electrode 114 can be formed in such a way that aconductive layer is formed over the gate insulating layer 112 by asputtering method, a CVD method, or a vacuum evaporation method, aresist mask is formed by a photolithography step over the conductivelayer, and the conductive layer is etched using the resist mask.

Next, third heat treatment may be performed in an inert gas atmosphereor an oxygen gas atmosphere (preferably, at 200° C. to 450° C.inclusive, for example, 250° C. to 350° C. inclusive). By the heattreatment, oxygen is supplied to oxygen defects generated by the firstand second heat treatment, so that it is possible to further reduce theoxygen defects which serve as donors, satisfy the stoichiometricproportion, and make the oxide semiconductor stack 110 closer to ani-type oxide semiconductor or a substantially i-type oxidesemiconductor. Note that the third heat treatment may be performedbefore formation of the gate electrode 114 or after formation of aninsulating layer 116 which is formed later.

Next, the insulating layer 116 is formed over the gate insulating layer112 and the gate electrode 114 (see FIG. 9D). The insulating layer 116may contain hydrogen. The insulating layer 116 can be formed by asputtering method, a CVD method, or the like. In this embodiment, asilicon nitride layer which is one of nitride insulating layers obtainedby a CVD method is used.

The third heat treatment is performed in a nitrogen atmosphere at 150°C. to 450° C. inclusive, preferably 250° C. to 440° C. inclusive. Inaddition, the third heat treatment may be performed in an oxygenatmosphere, a rare gas atmosphere, or a dry air atmosphere withoutlimitation to a nitrogen atmosphere.

Through the above process, a transistor 150 having the oxidesemiconductor stack which is highly purified and has single crystalregions and in which the hydrogen concentration is reduced can beformed.

After the step in FIG. 8C, in some cases, the second multi-componentoxide semiconductor layer 107 including single crystal regions is etchedinto an island-shape but the single-component oxide semiconductor layer105 including single crystal regions is not etched into an island-shapedepending on the etching condition, and the first multi-component oxidesemiconductor layer 103 including single crystal regions and thesingle-component oxide semiconductor layer 105 including single crystalregions remain over the entire surface of the insulating layer 101 asillustrated in FIG. 10A. This is because when the temperature of thefirst heat treatment is higher than that of the second heat treatment, adegree of crystallinity of the first multi-component oxide semiconductorlayer 103 including single crystal regions and the single-componentoxide semiconductor layer 105 including single crystal regions is higherthan that of the second multi-component oxide semiconductor layer 107including single crystal regions; therefore, the etching rate of thefirst multi-component oxide semiconductor layer 103 including singlecrystal regions and the single-component oxide semiconductor layer 105including single crystal regions becomes low.

After that, through the steps illustrated in FIG. 8E and FIGS. 9A to 9D,a transistor 152 as illustrated in FIG. 10B is obtained, in which thefirst multi-component oxide semiconductor layer 103 including singlecrystal regions and the single-component oxide semiconductor layer 105including single crystal regions are formed over the insulating layer101, the island-shaped second multi-component oxide semiconductor layer107 a including single crystal regions, the wirings 108 a and 108 b, andthe gate insulating layer 112 are formed over the single-component oxidesemiconductor layer 105 including single crystal regions, and the gateelectrode 114 is formed over the gate insulating layer 112.

A conventional oxide semiconductor is generally an n-type semiconductorand current tends to flow between source and drain electrodes even whengate voltage is 0 V in a transistor using a conventional oxidesemiconductor; that is, the transistor tends to be normally on. In thecase where the transistor is normally on, it is difficult to control acircuit even when the field-effect mobility is high. It is known thathydrogen can be a donor in an oxide semiconductor and is one factorcausing an oxide semiconductor to be an n-type semiconductor. Further,an oxygen defect is known as one factor causing an oxide semiconductorto be an n-type semiconductor.

Therefore, in order to make the oxide semiconductor be an i-type oxidesemiconductor, the oxide semiconductor is highly purified by removinghydrogen, water, hydroxyl group, hydride, or the like that is an n-typeimpurity along with the crystal growth in the first heat treatment andthe second heat treatment so as to contain an impurity that is not amain component of the oxide semiconductor as little as possible and ismade to be an intrinsic oxide semiconductor by removing oxygen defectsin the third heat treatment. In other words, this embodiment has afeature that the oxide semiconductor is made to be a highly purifiedi-type (intrinsic) oxide semiconductor or an oxide semiconductor closethereto not by addition of an impurity but by removal of an impuritysuch as hydrogen, water, hydroxyl group, or hydride or oxygen defects asmuch as possible. In particular, since the oxide semiconductor describedin this embodiment is crystallized to a high degree, it is characterizedby having fewer impurities or defects than an amorphous,microcrystalline, or polycrystalline oxide semiconductor. By highlypurifying the oxide semiconductor as described above, the thresholdvoltage of the transistor can be positive, so that a so-callednormally-off switching element can be achieved.

The hydrogen concentration of the oxide semiconductor at this time islower than or equal to 1×10¹⁸ cm⁻³, preferably lower than or equal to1×10¹⁶ cm⁻³, more preferably substantially 0. Moreover, the carrierdensity of the oxide semiconductor is lower than 1×10¹⁴ cm⁻³, preferablylower than 1×10¹² cm⁻³, more preferably lower than 1.45×10¹⁰ cm⁻³. Thatis, the carrier density of the oxide semiconductor is as close to zeroas possible. Furthermore, the band gap of the oxide semiconductor isgreater than or equal to 2 eV, preferably greater than or equal to 2.5eV, more preferably greater than or equal to 3 eV. The hydrogenconcentration in the oxide semiconductor is measured by secondary ionmass spectroscopy (SIMS). The carrier density can be measured by theHall effect measurement. Lower carrier density can be calculated withthe use of measurement results of capacitance-voltage (CV) measurement.

In the oxide semiconductor, the carrier density is sufficiently low(e.g., lower than 1×10¹²/cm³, preferably lower than 1.45×10¹⁰/cm³) ascompared with the minimum carrier density (approximately 1×10¹⁴/cm³) ofa general silicon wafer.

Further, when drain voltage is in the range of 1 V to 10 V in atransistor with a channel length of 3 μm and a channel width of 1×10⁴μm, at room temperature, off-state current (current which flows betweena source and a drain when the voltage between a gate and the source islower than or equal to 0 V) can be lower than or equal to the lowerlimit of measurement and the subthreshold swing (S value) can be 0.1V/dec (the thickness of the gate insulating layer: 100 nm). By highlypurifying the oxide semiconductor as described above, off-state currentcan be reduced from 1×10⁻²⁰ A (10 zA (zeptoampere)) to about 1×10⁻¹⁹ A(100 zA). Off-state current is made to flow by generation andrecombination of electrons and holes through direct recombination orindirect recombination; however, since an oxide semiconductor has a wideband gap and a large amount of thermal energy is needed for electronicexcitation, direct recombination and indirect recombination are lesslikely to occur. Thus, in the state where a negative potential isapplied to the gate electrode (off state), since the number of holesthat are minority carriers is substantially zero, direct recombinationand indirect recombination are less likely to occur and the amount ofcurrent is extremely small.

Note that the resistance when the transistor is off (off-stateresistance R) can be calculated using Ohm's law from the off-statecurrent and the drain voltage, and the off-state resistivity ρ can becalculated using Formula, ρ=RA/L (R is the off-state resistance), fromthe cross-sectional area A of the channel formation region and thechannel length L. The off-state resistivity is preferably higher than orequal to 1×10⁹ Ω·m (or 1×10¹⁰ Ω·m). Here, the cross-section area A canbe obtained in accordance with the formula A=dW (d: the thickness of thechannel formation region, W: the channel width).

Off-state current of a transistor including amorphous silicon is about10⁻¹² A, whereas off-state current of a transistor including an oxidesemiconductor is much lower than 10⁻¹² A. As described above, thetransistor 150 with excellent off-state current characteristics can beobtained with the use of such an i-type or substantially i-type oxidesemiconductor.

Furthermore, in a transistor, an oxide semiconductor is made to functionas a path through which carriers flow by reducing or preferablyeliminating carriers of the oxide semiconductor. Accordingly, the oxidesemiconductor is an i-type (intrinsic) oxide semiconductor which ishighly purified and includes extremely small number of or no carriers,and off-state current can be extremely small in the state where thetransistor is in an off-state, which is the technical idea of thisembodiment.

In addition, when the oxide semiconductor functions as a path and theoxide semiconductor itself is made to be an i-type (intrinsic) oxidesemiconductor which is highly purified so as to include no carriers orextremely few carriers, carriers are supplied by source and drainelectrodes. By appropriately selecting the electron affinity (χ) and theFermi level which may ideally correspond to the intrinsic Fermi level ofthe oxide semiconductor, and the work function of the source and drainelectrodes, carriers can be injected from the source and drainelectrodes so that an n-channel transistor and a p-channel transistorcan be manufactured as appropriate.

As described above, when the oxide semiconductor is highly purified sothat impurities that are not main components of the oxide semiconductor,typically, hydrogen, water, hydroxyl group, or hydride, are contained aslittle as possible and is made to include single crystal regions,favorable operation of the transistor can be obtained. In particular,the on-off ratio can be improved. In addition, the amount of shift inthreshold voltage of the transistor before and after the BT test can besuppressed, whereby high reliability can be obtained. Further,temperature dependence of electrical characteristics can be suppressed.Although any metal oxide which has been already reported is in anamorphous state or a polycrystalline state or can be in a single crystalstate only by treatment at a temperature as high as around 1400° C., anoxide semiconductor layer including single crystal regions can be formedwith the use of a large-area substrate at a relatively low temperatureby the above-described method in which a single-component oxidesemiconductor layer including flat-plate-shaped single crystal regionsis formed and then crystal growth is carried out with the use of thesingle crystal regions as a seed crystal.

This embodiment can be implemented in appropriate combination with anyof the structures described in other embodiments.

Embodiment 3

In this embodiment, a method for forming the oxide semiconductor stack110 which is different from those in Embodiments 1 and 2 will bedescribed with reference to FIGS. 11A to 11D.

In a manner similar to that in Embodiment 2, an insulating layer 101 isformed over a substrate 100 as illustrated in FIG. 11A. Next, a firstmulti-component oxide semiconductor layer 102 is formed over theinsulating layer 101, and a single-component oxide semiconductor layer104 is formed over the first multi-component oxide semiconductor layer102.

Then, in a manner similar to that in Embodiment 1, first heat treatmentis performed, so that a first multi-component oxide semiconductor layer103 including single crystal regions and a single-component oxidesemiconductor layer 105 including single crystal regions are formed asillustrated in FIG. 11B. After that, a second multi-component oxidesemiconductor layer 106 is formed over the single-component oxidesemiconductor layer 105 including single crystal regions.

Next, a resist mask is formed over the second multi-component oxidesemiconductor layer 106 by a photolithography step, and the firstmulti-component oxide semiconductor layer 103 including single crystalregions, the single-component oxide semiconductor layer 105 includingsingle crystal regions, and the second multi-component oxidesemiconductor layer 106 are etched with the use of the resist mask,whereby an island-shaped first multi-component oxide semiconductor layer103 a including a singe crystal region, an island-shapedsingle-component oxide semiconductor layer 105 a including singlecrystal regions, and an island-shaped multi-component oxidesemiconductor layer 106 a are formed. After that, the resist mask isremoved (see FIG. 11C).

Then, through second heat treatment, crystal growth of the secondmulti-component oxide semiconductor layer 106 a is carried out using thesingle-component oxide semiconductor layer 105 a including singlecrystal regions as a seed crystal, whereby a second multi-componentoxide semiconductor layer 107 a including single crystal regions isformed. Through the above steps, an oxide semiconductor stack 110 whichhas the first multi-component oxide semiconductor layer 103 a includingsingle crystal regions, the single-component oxide semiconductor layer105 a including single crystal regions, and the second multi-componentoxide semiconductor layer 107 a including single crystal regions can beformed. After that, through the steps illustrated in FIG. 8E and FIGS.9A to 9D, a transistor 150 as illustrated in FIG. 1 can be formed.

The second multi-component oxide semiconductor layer including singlecrystal regions has a high degree of crystallinity; thus, depending onthe etching condition, the etching rate of the second multi-componentoxide semiconductor layer including single crystal regions is lower thanthat of the second multi-component oxide semiconductor layer beforebeing crystallized. Accordingly, by etching the second multi-componentoxide semiconductor layer into an island-shape before the second heattreatment, etching time can be shortened.

This embodiment can be implemented in appropriate combination with anyof the structures described in other embodiments.

Embodiment 4

In this embodiment, a method for forming the oxide semiconductor stack110 which is different from those in Embodiments 1 to 3 will bedescribed with reference to FIGS. 12A to 12D.

In a manner similar to that in Embodiment 2, an insulating layer 101 isformed over a substrate 100. Next, a first multi-component oxidesemiconductor layer is formed over the insulating layer 101, and asingle-component oxide semiconductor layer is formed over the firstmulti-component oxide semiconductor layer. Then, in a manner similar tothat in Embodiment 1, first heat treatment is performed, so that a firstmulti-component oxide semiconductor layer 103 including single crystalregions and a single-component oxide semiconductor layer 105 includingsingle crystal regions are formed (see FIG. 12A).

Next, a resist mask is formed over the single-component oxidesemiconductor layer 105 including single crystal regions by aphotolithography step, and the first multi-component oxide semiconductorlayer 103 including single crystal regions and the single-componentoxide semiconductor layer 105 including single crystal regions areetched with the use of the resist mask, whereby an island-shaped firstmulti-component oxide semiconductor layer 103 b including single crystalregions and an island-shaped single-component oxide semiconductor layer105 b including single crystal regions are formed as illustrated in FIG.12B. Then, the resist mask is removed.

After that, a second multi-component oxide semiconductor layer 106 isformed over the single-component oxide semiconductor layer 105 bincluding single crystal regions and the insulating layer 101.

Next, a resist mask is formed over the second multi-component oxidesemiconductor layer 106 by a photolithography step, and the firstmulti-component oxide semiconductor layer 103 b including single crystalregions, the single-component oxide semiconductor layer 105 b includingsingle crystal regions, and the second multi-component oxidesemiconductor layer 106 are etched with the use of the resist mask,whereby an island-shaped first multi-component oxide semiconductor layer103 a including single crystal regions, an island-shapedsingle-component oxide semiconductor layer 105 a including singlecrystal regions, and an island-shaped second multi-component oxidesemiconductor layer 106 a are formed. After that, the resist mask isremoved (see FIG. 12C).

Then, through second heat treatment, crystal growth of the secondmulti-component oxide semiconductor layer 106 a is carried out using thesingle-component oxide semiconductor layer 105 a including singlecrystal regions as a seed crystal, whereby a second multi-componentoxide semiconductor layer 107 a including single crystal regions isformed. Through the above steps, an oxide semiconductor stack 110 whichhas the first multi-component oxide semiconductor layer 103 a includingsingle crystal regions, the single-component oxide semiconductor layer105 a including single crystal regions, and the second multi-componentoxide semiconductor layer 107 a including single crystal regions can beformed (see FIG. 12D). After that, through the steps illustrated in FIG.8E and FIGS. 9A to 9D, a transistor 150 as illustrated in FIG. 1 can beformed.

The second multi-component oxide semiconductor layer including singlecrystal regions has a high degree of crystallinity; thus, depending onthe etching condition, the etching rate of the second multi-componentoxide semiconductor layer including single crystal regions is lower thanthat of the second multi-component oxide semiconductor layer beforebeing crystallized. Accordingly, by etching the second multi-componentoxide semiconductor layer into an island-shape before the second heattreatment, etching time can be shortened.

This embodiment can be implemented in appropriate combination with anyof the structures described in other embodiments.

Embodiment 5

In this embodiment, a mode in which a method for forming the secondmulti-component oxide semiconductor layer including single crystalregions is different from that in Embodiment 1 will be described withreference to FIGS. 8A to 8E and FIGS. 13A and 13B.

In a manner similar to that in Embodiment 2, an insulating layer 101 isformed over a substrate 100 as illustrated in FIG. 8A. Next, a firstmulti-component oxide semiconductor layer 102 is formed over theinsulating layer 101, and a single-component oxide semiconductor layer104 is formed over the first multi-component oxide semiconductor layer102.

Then, in a manner similar to that in Embodiment 1, first heat treatmentis performed, so that a first multi-component oxide semiconductor layer103 including single crystal regions and a single-component oxidesemiconductor layer 105 including single crystal regions are formed asillustrated in FIG. 13A.

Next, as illustrated in FIG. 13B, a second multi-component oxidesemiconductor layer 107 including single crystal regions is formed overthe single-component oxide semiconductor layer 105 including singlecrystal regions by a sputtering method while heating is performed at200° C. to 600° C. inclusive, preferably 200° C. to 550° C. inclusive.The second multi-component oxide semiconductor layer 107 includingsingle crystal regions has a non-wurtzite crystal structure that is ahexagonal crystal structure. Here, the second multi-component oxidesemiconductor layer is deposited while heating is performed. Sincecrystal growth (also referred to as epitaxial growth or axial growth)proceeds with the use of single crystal regions at the surface of thesingle-component oxide semiconductor layer 105 including single crystalregions as a seed crystal, the second multi-component oxidesemiconductor layer 107 including single crystal regions can be formedso as to have the same crystal axis, particularly, the same c-axisdirection as the single-component oxide semiconductor layer 105including single crystal regions. As a result, without second heattreatment, the crystallized second multi-component oxide semiconductorlayer 107 including single crystal regions which has the same c-axisdirection as the single-component oxide semiconductor layer 105including single crystal regions can be formed.

After that, through the steps described in Embodiment 1, a transistor150 can be manufactured.

In this embodiment, the number of times of heat treatment can bereduced, whereby throughput can be increased.

This embodiment can be implemented in appropriate combination with anyof the structures described in other embodiments.

Embodiment 6

Although a process for manufacturing a top-gate transistor is describedin Embodiments 1 to 5, a process for manufacturing a bottom-gatetransistor will be described in this embodiment with reference to FIGS.14A to 14E.

In this embodiment, a glass substrate is used as a substrate 100, andheat treatment at 650° C. for 6 minutes is performed twice on thesubstrate 100 in advance. By heating the substrate before the formationof a transistor, film peeling due to shrink of the substrate ormisalignment of a mask can be suppressed. Next, a conductive layer isformed over the substrate 100 which has an insulating surface, and then,a gate electrode 400 is provided by a photolithography step with the useof a photomask.

Further, the insulating layer 101 described in Embodiment 2 may beprovided between the substrate 100 and the gate electrode 400. With theinsulating layer 101, adhesion between the substrate 100 and the gateelectrode 400 can be increased.

The material and manufacturing method of the gate electrode 114described in Embodiment 1 can be employed as appropriate for the gateelectrode 400. The end portion of the gate electrode 400 preferably hasa tapered shape because coverage with an insulating layer, asemiconductor layer, and a conductive layer which are formed later canbe improved.

Then, a gate insulating layer 401 is formed over the gate electrode 400.For the gate insulating layer 401, the material and manufacturing methodof the gate insulating layer 112 described in Embodiment 1 can be usedas appropriate.

Next, in a manner similar to that in Embodiment 1, after a firstmulti-component oxide semiconductor layer is formed over the gateinsulating layer 401 and a single-component oxide semiconductor layer isformed over the first multi-component oxide semiconductor layer, firstheat treatment is performed, so that a first multi-component oxidesemiconductor layer 403 including single crystal regions and asingle-component oxide semiconductor layer 405 including single crystalregions are formed (see FIG. 14A).

Then, after a second multi-component oxide semiconductor layer is formedover the single-component oxide semiconductor layer 405 including singlecrystal regions in a manner similar to that in Embodiment 1, second heattreatment is performed, so that a second multi-component oxidesemiconductor layer 407 including single crystal regions is formed (seeFIG. 14B).

After a resist mask is formed over the second multi-component oxidesemiconductor layer 407 including single crystal regions by aphotolithography step, etching is performed, so that an island-shapedfirst multi-component oxide semiconductor layer 403 a including singlecrystal regions, an island-shaped single-component oxide semiconductorlayer 405 a including single crystal regions, and an island-shapedsecond multi-component oxide semiconductor layer 407 a including singlecrystal regions are formed.

Wirings 408 a and 408 b functioning as a source electrode and a drainelectrode are formed over the gate insulating layer 401, theisland-shaped first multi-component oxide semiconductor layer 403 aincluding single crystal regions, the island-shaped single-componentoxide semiconductor layer 405 a including single crystal regions, andthe island-shaped second multi-component oxide semiconductor layer 407 aincluding single crystal regions. The wirings 408 a and 408 b can beformed in a manner similar to that of the wirings 108 a and 108 bdescribed in Embodiment 1.

Next, after an oxide insulating layer 412 serving as a protectiveinsulating layer is formed in contact with part of the oxidesemiconductor layer, third heat treatment may be performed (see FIG.14C).

In this embodiment, a 300-nm-thick silicon oxide layer is formed as theoxide insulating layer 412 by a sputtering method. The substratetemperature at the formation may be room temperature to 300° C.inclusive and is 100° C. in this embodiment. The silicon oxide layer canbe formed by a sputtering method in a rare gas (typically argon)atmosphere, an oxygen atmosphere, or a mixed atmosphere containing arare gas (typically argon) and oxygen. As a target, a silicon oxidetarget or a silicon target can be used. For example, with the use of asilicon target, the silicon oxide layer can be formed by a sputteringmethod in an atmosphere containing oxygen and nitrogen. The oxideinsulating layer 412 which is formed in contact with the crystallizedisland-shaped first multi-component oxide semiconductor layer 403 aincluding single crystal regions, the crystallized island-shapedsingle-component oxide semiconductor layer 405 a including singlecrystal regions and the crystallized island-shaped secondmulti-component oxide semiconductor layer 407 a including single crystalregions has a thickness of 10 nm to 500 nm inclusive and is typicallyformed using a silicon oxide layer, a silicon nitride oxide layer, analuminum oxide layer, an aluminum oxynitride layer, or the like.

In addition, the temperature of the third heat treatment is set in therange of 200° C. to 450° C. inclusive, preferably 250° C. to 350° C.inclusive. By the heat treatment, oxygen is supplied to oxygen defectsgenerated by the first heat treatment and the second heat treatment, sothat it is possible to further reduce the oxygen defects which serve asdonors, satisfy the stoichiometric proportion, and make the firstmulti-component oxide semiconductor layer 403 a including single crystalregions, the single-component oxide semiconductor layer 405 a includingsingle crystal regions, and the second multi-component oxidesemiconductor layer 407 a including single crystal regions closer toi-type oxide semiconductor layers or substantially i-type oxidesemiconductor layers.

Next, an insulating layer 416 is formed over the oxide insulating layer412. After that, fourth heat treatment may be performed (see FIG. 14D).The insulating layer 416 can be formed in a manner similar to that ofthe insulating layer 116 described in Embodiment 2.

The fourth heat treatment is performed in a nitrogen atmosphere at 150°C. to 450° C. inclusive, preferably 250° C. to 440° C. inclusive. Inaddition, the fourth heat treatment may be performed in an oxygenatmosphere, a rare gas atmosphere, or a dry air atmosphere withoutlimitation to the nitrogen atmosphere.

Through the above steps, a transistor 450 including the firstmulti-component oxide semiconductor layer 403 a including single crystalregions and the second multi-component oxide semiconductor layer 407 aincluding single crystal regions, which are obtained by crystal growthfrom a crystal region of the single-component oxide semiconductor layer405 a including single crystal regions, is completed.

Next, an interlayer insulating layer 418 may be formed over theinsulating layer 416 (see FIG. 14E). The interlayer insulating layer 418is formed using a material containing an inorganic insulating material,e.g., a silicon oxide layer, a silicon nitride oxide layer, a siliconnitride layer, a hafnium oxide layer, an aluminum oxide layer, or atantalum oxide layer which is obtained by a sputtering method, a CVDmethod, or the like. Alternatively, an organic resin such as acrylic,polyimide, or an epoxy resin can be used for the material of theinterlayer insulating layer 418. Note that a stacked structure includingthe oxide insulating layer 412, the insulating layer 416, and theinterlayer insulating layer 418 is used in this embodiment, but anembodiment of the invention disclosed herein is not limited to thisexample. A single-layer or a stacked structure including two layers orfour or more layers may be used.

Further, one feature of the transistor described in this embodiment isthat, as illustrated in FIG. 14E, the gate electrode 400 includesregions overlapping with the wirings 408 a and 408 b. The gate electrode400 includes a region between an end portion of the wiring 408 a and astep of the gate insulating layer 401, in other words, a region betweenthe end portion of the wiring 408 a and a point in the gate insulatinglayer at which a flat surface is changed to a tapered surface in thecross-sectional view (here, a L_(OV) region in FIG. 14E). The L_(OV)region is important in view of preventing carriers from flowing to acrystal grain boundary of the oxide semiconductor which is generated dueto the step of the end portion of the gate electrode.

Furthermore, a back gate electrode may be formed over the oxideinsulating layer 412. FIGS. 15A and 15B illustrate a manufacturingprocess in such a case. After the state of FIG. 14C is obtained, acontact hole reaching the gate electrode 400 is formed and a back gateelectrode 414 is formed over the oxide insulating layer 412 (see FIG.15A). Then, after an insulating layer 416 is formed over the back gateelectrode 414 and the oxide insulating layer 412, fourth heat treatmentmay be performed. Through the above steps, a transistor 451 illustratedin FIG. 15B can be formed. When the back gate electrode 414 is providedat the position overlapping with a channel formation region formed inthe first multi-component oxide semiconductor layer including singlecrystal regions, the single-component oxide semiconductor layerincluding single crystal regions, and the second multi-component oxidesemiconductor layer including single crystal regions, the back gateelectrode functions as a passivation layer and can prevent entry ofhydrogen into the channel formation region from the outside, so that theamount of change in threshold voltage of the transistor 451 before andafter a BT test (bias-temperature stress test) can be reduced.

The back gate electrode 414 may have a potential different from that ofthe gate electrode 400 of the transistor 451. In addition, the potentialof the back gate electrode 414 may be GND or 0 V, or the back gateelectrode 414 may be in a floating state. In such a case, the contacthole which reaches the gate electrode 400 is not formed before theformation of the back gate electrode 414, whereby the potentials of thegate electrode 400 and the back gate electrode 414 can be different fromeach other.

Next, an interlayer insulating layer 418 for planarization is formedover the insulating layer 416, so that a cross-sectional structureillustrated in FIG. 15B can be obtained.

This embodiment can be implemented in appropriate combination with anyof the structures described in other embodiments.

Embodiment 7

In this embodiment, a structure of a channel-stop transistor will bedescribed with reference to FIG. 16.

Since this embodiment is only partly different from Embodiment 6,detailed description is omitted here.

A process will be described below. In a manner similar to that inEmbodiment 6, a gate electrode 400 and a gate insulating layer 402 areformed over a substrate 100. Next, in a manner similar to that inEmbodiment 6, a first multi-component oxide semiconductor layer isformed over the gate insulating layer 402, a single-component oxidesemiconductor layer is formed over the first multi-component oxidesemiconductor layer, and first heat treatment is performed tocrystallize the first multi-component oxide semiconductor layer and thesingle-component oxide semiconductor layer, whereby a firstmulti-component oxide semiconductor layer including single crystalregions and a single-component oxide semiconductor layer includingsingle crystal regions are formed. Then, in a manner similar to that inEmbodiment 6, a second multi-component oxide semiconductor layer isformed, and second heat treatment is performed to crystallize the secondmulti-component oxide semiconductor layer, whereby a secondmulti-component oxide semiconductor layer including single crystalregions is formed.

Next, an oxide insulating layer is formed and third heat treatment isperformed. The oxide insulating layer is formed using the same materialas the oxide insulating layer 412 described in Embodiment 6. Inaddition, the conditions of the third heat treatment are the same as thethird heat treatment described in Embodiment 6, and oxygen is suppliedto the first multi-component oxide semiconductor layer including singlecrystal regions, the single-component oxide semiconductor layerincluding single crystal regions, and the second multi-component oxidesemiconductor layer including single crystal regions to reduce oxygendefects in the first multi-component oxide semiconductor layer includingsingle crystal regions, the single-component oxide semiconductor layerincluding single crystal regions, and the second multi-component oxidesemiconductor layer including single crystal regions.

Next, by a photolithography step, a resist mask is formed over the oxideinsulating layer and selective etching is performed to form anisland-shaped first multi-component oxide semiconductor layer 403 aincluding single crystal regions, an island-shaped single-componentoxide semiconductor layer 405 a including single crystal regions, and anisland-shaped second multi-component oxide semiconductor layer 407 aincluding single crystal regions. At this time, the oxide insulatinglayer is also etched.

Next, the resist mask is removed, and by a photolithography, a resistmask is formed and selective etching is performed to form anisland-shaped oxide insulating layer 420.

Then, wirings 408 a and 408 b are formed over the island-shaped oxideinsulating layer 420, the island-shaped first multi-component oxidesemiconductor layer 403 a including single crystal regions, theisland-shaped single-component oxide semiconductor layer 405 a includingsingle crystal regions, and the island-shaped second multi-componentoxide semiconductor layer 407 a including single crystal regions in amanner similar to that in Embodiment 1.

Next, an insulating layer 416 is formed over the wirings 408 a and 408 band the island-shaped oxide insulating layer 420. After that, fourthheat treatment may be performed. The conditions of the fourth heattreatment may be the same as the fourth heat treatment described inEmbodiment 6.

Through the above steps, a channel-stop transistor 452 including thefirst multi-component oxide semiconductor layer including single crystalregions, the single-component oxide semiconductor layer including singlecrystal regions, and the second multi-component oxide semiconductorlayer including single crystal regions is completed.

Next, an interlayer insulating layer 418 for planarization is formedover the insulating layer 416, so that a cross-sectional structureillustrated in FIG. 16 can be obtained.

This embodiment can be implemented in appropriate combination with anyof the structures described in other embodiments.

Embodiment 8

In this embodiment, a structure applicable to Embodiments 6 and 7 willbe described with reference to FIG. 17.

In this embodiment, a first multi-component oxide semiconductor layer403 b including single crystal regions, a single-component oxidesemiconductor layer 405 b including single crystal regions, and a secondmulti-component oxide semiconductor layer 407 b including single crystalregions each have a smaller area than that of a gate electrode 400 andoverlap with the gate electrode 400 entirely. Therefore, when the gateelectrode 400 is formed using a metal element or an alloy having alight-blocking property, light which comes from the outside through thesubstrate 100 and is emitted to the first multi-component oxidesemiconductor layer 403 b including single crystal regions, thesingle-component oxide semiconductor layer 405 b including singlecrystal regions, and the second multi-component oxide semiconductorlayer 407 b including single crystal regions can be reduced. Inaddition, the first multi-component oxide semiconductor layer 403 bincluding single crystal regions, the single-component oxidesemiconductor layer 405 b including single crystal regions, and thesecond multi-component oxide semiconductor layer 407 b including singlecrystal regions overlap with only a flat portion of the gate electrode400 which does not include an end portion and thus have a flat shape.Accordingly, all the c-axis directions which are perpendicular to thesurface are parallel to each other, so that a crystal grain boundary isunlikely to be formed and a single crystal structure with a high degreeof crystallinity can be substantially obtained.

Through the above steps, a transistor including a first multi-componentoxide semiconductor layer, a single-component oxide semiconductor layer,and a second multi-component oxide semiconductor layer whichsubstantially have a single crystal structure can be obtained.

This embodiment can be implemented in appropriate combination with anyof the structures described in other embodiments.

Embodiment 9

In this embodiment, as an example of the case where the semiconductordevice described in any of the above embodiments is used for asemiconductor integrated circuit, a semiconductor device having astacked structure with a semiconductor device using anothersemiconductor material will be described with reference to FIG. 18.

FIG. 18 is a cross-sectional view illustrating an embodiment of astructure of a semiconductor device according to this embodiment. Thesemiconductor device illustrated in FIG. 18 includes a transistor 250 inwhich a material other than an oxide semiconductor (e.g., silicon) isused in a lower portion and a transistor 150 in which an oxidesemiconductor is used in an upper portion. The transistor 150 in whichan oxide semiconductor is used is the transistor 150 illustrated inFIG. 1. Although the transistors 250 and 150 are n-channel transistorshere, p-channel transistors may be used. In particular, it is easy touse a p-channel transistor as the transistor 250.

The transistor 250 includes a channel formation region 216 which isprovided in a substrate 200 containing a semiconductor material;impurity regions 214 between which the channel formation region 216 issandwiched and high-concentration impurity regions 220 between which thechannel formation region 216 is sandwiched (which are also collectivelycalled impurity regions); a gate insulating layer 208 a provided overthe channel formation region 216; a gate electrode 210 a provided overthe gate insulating layer 208 a; and wirings 230 a and 230 b whichfunction as a source electrode and a drain electrode and areelectrically connected to the impurity regions 214 (see FIG. 18).

Here, a sidewall insulating layer 218 is provided on a side surface ofthe gate electrode 210 a. The high-concentration impurity regions 220are provided in regions of the substrate 200 which do not overlap withthe sidewall insulating layer 218 when seen from a directionperpendicular to a main surface of the substrate 200, and metal compoundregions 224 in contact with the high-concentration impurity regions 220are provided. An element isolation insulating layer 206 is provided onthe substrate 200 so as to surround the transistor 250. An interlayerinsulating layer 226 and an interlayer insulating layer 228 are providedso as to cover the transistor 250. The wirings 230 a and 230 b areelectrically connected to the metal compound regions 224 throughopenings formed in the interlayer insulating layers 226 and 228 and aninsulating layer 234. In other words, the wirings 230 a and 230 b areelectrically connected to the high-concentration impurity regions 220and the impurity regions 214 through the metal compound regions 224.

The transistor 150 includes a first multi-component oxide semiconductorlayer 103 a including single crystal regions, a single-component oxidesemiconductor layer 105 a including single crystal regions, and a secondmulti-component oxide semiconductor layer 107 a including single crystalregions which are provided over an insulating layer 101; wirings 108 aand 108 b which are provided over and electrically connected to thefirst multi-component oxide semiconductor layer 103 a including singlecrystal regions, the single-component oxide semiconductor layer 105 aincluding single crystal regions, and the second multi-component oxidesemiconductor layer 107 a including single crystal regions and functionas a source electrode and a drain electrode; a gate insulating layer 112provided so as to cover the first multi-component oxide semiconductorlayer 103 a including single crystal regions, the single-component oxidesemiconductor layer 105 a including single crystal regions, the secondmulti-component oxide semiconductor layer 107 a including single crystalregions, and the wirings 108 a and 108 b; and a gate electrode 114provided over the gate insulating layer 112 in a region overlapping withthe second multi-component oxide semiconductor layer 107 a includingsingle crystal regions.

In addition, an insulating layer 116 and an interlayer insulating layer118 are provided over the transistor 150. Here, openings reaching thewirings 108 a and 108 b are provided in the gate insulating layer 112,the insulating layer 116, and the interlayer insulating layer 118.Through the openings, a wiring 254 d and a wiring 254 e are formed incontact with the wiring 108 a and the wiring 108 b, respectively. In amanner similar to that of the wirings 254 d and 254 e, a wiring 254 a, awiring 254 b, and a wiring 254 c are formed in contact with a wiring 236a, a wiring 236 b, and a wiring 236 c, respectively, through openingsprovided in the gate insulating layer 112, the insulating layer 116, andthe interlayer insulating layer 118.

In addition, an insulating layer 256 is provided over the interlayerinsulating layer 118. A wiring 258 a, a wiring 258 b, a wiring 258 c,and a wiring 258 d are provided so as to be embedded in the insulatinglayer 256. Here, the wiring 258 a is in contact with the wiring 254 a;the wiring 258 b is in contact with the wiring 254 b; the wiring 258 cis in contact with the wiring 254 c and the wiring 254 d; and the wiring258 d is in contact with the wiring 254 e.

In other words, the wiring 108 a of the transistor 150 is electricallyconnected to another element (such as the transistor in which a materialother than an oxide semiconductor is used) through a wiring 230 c, thewiring 236 c, the wiring 254 c, the wiring 258 c, and the wiring 254 d.In addition, the wiring 108 b of the transistor 150 is electricallyconnected to another element through the wiring 254 e and the wiring 258d. Note that the structure of the wirings for connection (such as thewiring 230 c, the wiring 236 c, the wiring 254 c, the wiring 258 c, andthe wiring 254 d) is not limited to the above structure, and appropriateaddition, omission, or the like is possible.

Note that for part of the wirings (e.g., the wiring 258 a, the wiring258 b, the wiring 258 c, and the wiring 258 d), a material containingcopper is preferably used. When a material containing copper is used forpart of them, conductivity can be improved. An electrode or a wiringcontaining copper can be formed by a so-called damascene process or thelike.

As described above, in this embodiment, a typical embodiment of thesemiconductor device having a stacked structure is described; however,an embodiment of the invention disclosed herein is not limited thereto.For example, a structure of a transistor, the number of insulatinglayers and arrangement thereof, the number of electrodes and wirings anda connection relation therebetween, and the like can be changed asappropriate. As an example of a connection relation between electrodes,a structure can be employed in which the gate electrode 210 a of thetransistor 250 and the wiring 108 a or 108 b of the transistor 150 areelectrically connected to each other.

With a combination of a transistor in which a material other than anoxide semiconductor is used and a transistor in which an oxidesemiconductor is used, a semiconductor device having electriccharacteristics different from those of the transistor in which an oxidesemiconductor is used can be achieved.

The structures, methods, and the like described in this embodiment canbe combined as appropriate with any of the structures, methods, and thelike described in other embodiments.

Embodiment 10

In this embodiment, a structure of a semiconductor device whichfunctions as a memory device will be described as a specific embodimentof a semiconductor device according to an embodiment of the inventiondisclosed herein. Note that a semiconductor device including atransistor in which a first multi-component oxide semiconductor layerincluding single crystal regions, a single-component oxide semiconductorlayer including single crystal regions, and a second multi-componentoxide semiconductor layer including single crystal regions (hereinafterreferred to as an oxide semiconductor stack) are used and a transistorin which a material other than an oxide semiconductor stack (e.g.,silicon) is used is described here.

In a semiconductor device illustrated in FIG. 19, a gate electrode of atransistor 300 and one of a source electrode and a drain electrode of atransistor 302 are electrically connected to each other. In addition, afirst wiring (a first line, also referred to as a source line) iselectrically connected to a source electrode of the transistor 300. Asecond wiring (a second line, also referred to as a bit line) iselectrically connected to a drain electrode of the transistor 300. Athird wiring (a third line, also referred to as a first signal line) iselectrically connected to the other of the source electrode and thedrain electrode of the transistor 302. A fourth wiring (a fourth line,also referred to as a second signal line) is electrically connected to agate electrode of the transistor 302. Here, a material other than anoxide semiconductor stack (e.g., silicon) is used for the transistor300, and an oxide semiconductor stack is used for the transistor 302. InFIG. 19, the transistor 302 is denoted by “OS tr”.

The transistor 300 formed using a material other than an oxidesemiconductor stack can operate at sufficiently high speed. Therefore,with the use of the transistor 300, high-speed reading of storedcontents and the like are possible. Moreover, the transistor 302 formedusing an oxide semiconductor stack has extremely small off-statecurrent. For that reason, a potential of the gate electrode of thetransistor 300 can be held for an extremely long time by turning off thetransistor 302.

When the source electrode or the drain electrode of the transistor 302is electrically connected to the gate electrode of the transistor 300,an effect similar to that of a floating gate of a floating gatetransistor used for a nonvolatile memory element can be achieved.Therefore, in this embodiment, a portion where the source electrode orthe drain electrode of the transistor 302 is electrically connected tothe gate electrode of the transistor 300 is called a floating gateportion FG. The floating gate portion FG can be regarded as beingprovided in an insulator (a so-called floating state) and thus electriccharge is held in the floating gate portion FG. The off-state current ofthe transistor 302 is about 100,000 times lower than that of thetransistor 300 formed using a silicon semiconductor, so that loss ofelectric charge stored in the floating gate portion FG due to leakage ofthe transistor 302 can be ignored.

Employing such a structure can avoid deterioration of a gate insulatinglayer (a tunnel insulating layer) due to tunneling current which flowswhen electrons are injected into a floating gate, which has been aproblem of a conventional floating gate transistor. For that reason, alimitation on the number of writings can be theoretically ignored in thesemiconductor device illustrated in FIG. 19.

Note that a capacitor may be added to the floating gate portion FG.Addition of a capacitor to the floating gate portion FG facilitatesholding of electric charge and suppressing of a potential change of thefloating gate portion FG due to a potential change of each wiring.

In the semiconductor device illustrated in FIG. 19, writing, holding,and reading of data can be performed in the following manner, using theadvantage that the potential of the gate electrode of the transistor 300can be held.

First, writing and holding of data will be described. First, a potentialof the fourth wiring is set to a potential at which the transistor 302is turned on, and the transistor 302 is turned on. Therefore, apotential of the third wiring is applied to the gate electrode of thetransistor 300 (writing). After that, the potential of the fourth wiringis set to a potential at which the transistor 302 is turned off, and thetransistor 302 is turned off, whereby the potential of the gateelectrode of the transistor 300 is held (holding).

Since the off-state current of the transistor 302 is extremely small,the potential of the gate electrode of the transistor 300 is held for along time. For example, when the potential of the gate electrode of thetransistor 300 is a potential at which the transistor 300 is turned on,the on state of the transistor 300 is kept for a long time. Moreover,when the potential of the gate electrode of the transistor 300 is apotential at which the transistor 300 is turned off, the off state ofthe transistor 300 is kept for a long time.

Next, reading of data will be described. When a predetermined potential(a fixed potential) is supplied to the first wiring in a state where theon state or the off state of the transistor 300 is kept as describedabove, a potential of the second wiring varies depending on the on stateor the off state of the transistor 300.

In this manner, by comparing the potential of the first wiring with thepotential of the second wiring in a state where data is held, the datacan be read out.

Then, rewriting of data will be described. Rewriting of data isperformed in a manner similar to that of the writing and holding ofdata. That is, a potential of the fourth wiring is set to a potential atwhich the transistor 302 is turned on, and the transistor 302 is turnedon. Accordingly, the potential of the third wiring (a potential relatingto new data) is applied to the gate electrode of the transistor 300.After that, the potential of the fourth wiring is set to a potential atwhich the transistor 302 is turned off, and the transistor 302 is turnedoff; accordingly, the new data is held.

In the semiconductor device according to the invention disclosed herein,data can be directly rewritten by another writing of data as describedabove. For that reason, erasing operation which is necessary for a flashmemory or the like is not needed, so that a reduction in operation speeddue to erasing operation can be suppressed. In other words, high-speedoperation of the semiconductor device can be realized.

In addition, the semiconductor device according to this embodiment canhold data for an extremely long time because the transistor 302 hassmall off-state current. That is, refresh operation which is necessaryin a DRAM and the like is not needed, so that power consumption can besuppressed. Moreover, the semiconductor device can be used as asubstantially non-volatile semiconductor device.

Since writing or the like of data is performed with switching operationof the transistor 302, high voltage is not necessary and deteriorationof the element does not become a problem. Furthermore, data is writtenand erased depending on the on state or the off state of the transistor,whereby high-speed operation can be easily realized.

Since a transistor including a material other than an oxidesemiconductor can operate at sufficiently high speed, by using such atransistor, stored data can be read out at high speed.

Although an n-channel transistor in which electrons are carriers is usedin the above description, it is needless to say that a p-channeltransistor in which holes are carriers can be used instead of then-channel transistor.

The semiconductor device according to this embodiment can be formed, forexample, using the stacked structure of the transistors described in theabove embodiment. It is needless to say that the stacked structure ofthe transistors is not necessarily limited to the structure of thetransistors described in the above embodiment. For example, thetransistor 300 and the transistor 302 may be formed on the same surface.Further, since the semiconductor device according to this embodimentutilizes low off-state current of the transistor 302, there is noparticular limitation on the transistor 300. For example, the transistor300 is formed using a material other than an oxide semiconductor in thisembodiment; however, an oxide semiconductor may be used.

In this embodiment, the semiconductor device which is a minimum unit isdescribed; however, the structure of the semiconductor device is notlimited thereto. A more advanced semiconductor device can be formed byconnecting a plurality of semiconductor devices as appropriate. Forexample, a NAND-type or NOR-type semiconductor device serving as amemory device can be formed by using a plurality of the above-describedsemiconductor devices. The structure of the wirings is not limited tothat illustrated in FIG. 19 and can be changed as appropriate.

The structures, methods, and the like described in this embodiment canbe combined as appropriate with any of the structures, methods, and thelike described in other embodiments.

Embodiment 11

In this embodiment, a transistor including an oxide semiconductor stackthat is c-axis-aligned perpendicularly to the surface is manufactured,and by using the transistor for a pixel portion, and further for adriver circuit, a semiconductor device having a display function (alsoreferred to as a display device) is manufactured. Furthermore, when partor whole of a driver circuit is formed over the same substrate as apixel portion, a system-on-panel can be formed.

In this embodiment, a liquid crystal display device is described as asemiconductor device which is one mode of the present invention. First,the appearance and the cross section of a liquid crystal display panel,which is one mode of the semiconductor device, will be described withreference to FIGS. 20A and 20B. FIG. 20A is a top view of a panel inwhich transistors 4010 and 4011 each including an oxide semiconductorstack which is c-axis aligned perpendicularly to the surface, and aliquid crystal element 4013 are sealed between a first substrate 4001and a second substrate 4006 with a sealant 4005. FIG. 20B is across-sectional view along line M-N of FIG. 20A.

The sealant 4005 is formed to surround a pixel portion 4002, a signalline driver circuit 4003, and a scan line driver circuit 4004 that areprovided over the first substrate 4001. The second substrate 4006 isprovided over the pixel portion 4002, the signal line driver circuit4003, and the scan line driver circuit 4004. Thus, the pixel portion4002, the signal line driver circuit 4003, and the scan line drivercircuit 4004 are sealed together with a liquid crystal layer 4008 by thefirst substrate 4001, the sealant 4005, and the second substrate 4006.

The pixel portion 4002, the signal line driver circuit 4003, and thescan line driver circuit 4004 provided over the first substrate 4001each include a plurality of transistors. FIG. 20B illustrates thetransistor 4010 included in the pixel portion 4002 and the transistor4011 included in the scan line driver circuit 4004. Insulating layers4014, 4020, and 4021 are provided over the transistors 4010 and 4011.

The transistor including the oxide semiconductor stack which is c-axisaligned perpendicularly to the surface and described in Embodiment 6 canbe used as the transistors 4010 and 4011. In this embodiment, thetransistors 4010 and 4011 are n-channel transistors.

A conductive layer 4040 is provided over part of the insulating layer4021, which overlaps with a channel formation region of the oxidesemiconductor stack which is c-axis aligned perpendicularly to thesurface of the transistor 4011 for the driver circuit. The conductivelayer 4040 is provided so as to overlap with the channel formationregion of the oxide semiconductor stack which is c-axis alignedperpendicularly to the surface, whereby, as one effect, the conductivelayer 4040 functions as a passivation layer and can prevent entry ofhydrogen into the channel formation region from the outside, and thus,the amount of change in threshold voltage of the transistor 4011 beforeand after the BT test can be reduced. A potential of the conductivelayer 4040 may be the same as or different from that of a gate electrodeof the transistor 4011. The conductive layer 4040 can also function as asecond gate electrode. Further, the potential of the conductive layer4040 may be GND or 0 V, or the conductive layer 4040 may be in afloating state.

A pixel electrode 4030 included in the liquid crystal element 4013 iselectrically connected to the transistor 4010. A counter electrode 4031of the liquid crystal element 4013 is formed on the second substrate4006. The liquid crystal element 4013 corresponds to a region where thepixel electrode 4030, the counter electrode 4031, and the liquid crystallayer 4008 overlap with each other. Note that the pixel electrode 4030and the counter electrode 4031 are provided with an insulating layer4032 and an insulating layer 4033 serving as alignment films,respectively, and the liquid crystal layer 4008 is sandwiched betweenthe pixel electrode 4030 and the counter electrode 4031 with theinsulating layers 4032 and 4033 interposed therebetween.

As the liquid crystal layer 4008, a liquid crystal such as athermotropic liquid crystal, a low-molecular liquid crystal, ahigh-molecular liquid crystal, a polymer-dispersed liquid crystal, aferroelectric liquid crystal, or an anti-ferroelectric liquid crystal isused. Such a liquid crystal material exhibits a cholesteric phase, asmectic phase, a cubic phase, a chiral nematic phase, an isotropicphase, or the like depending on conditions.

Note that glass or plastics can be used as the second substrate 4006.

A columnar spacer 4035 which can be obtained by selectively etching aninsulating layer is provided to control a distance (a cell gap) betweenthe pixel electrode 4030 and the counter electrode 4031. Alternatively,a spherical spacer may be used. The counter electrode 4031 iselectrically connected to a common potential line provided over the sameinsulating substrate as the transistor 4010. In addition, with the useof a common connection portion, the counter electrode 4031 and thecommon potential line can be electrically connected to each other byconductive particles arranged between the pair of substrates. Note thatthe conductive particles are included in the sealant 4005.

Alternatively, a liquid crystal exhibiting a blue phase for which analignment film is unnecessary may be used. A blue phase is one of liquidcrystal phases, which is generated just before a cholesteric phasechanges into an isotropic phase while temperature of a cholestericliquid crystal is increased. Since the blue phase is only generatedwithin a narrow range of temperature, a liquid crystal compositionincluding a chiral agent at higher than or equal to 5 wt % is preferablyused for the liquid crystal layer 4008 in order to improve thetemperature range. The liquid crystal composition which includes aliquid crystal exhibiting a blue phase and a chiral agent has a shortresponse time of lower than or equal to 1 msec, has optical isotropy,which makes the alignment process unneeded, and has a small viewingangle dependence.

When a liquid crystal exhibiting a blue phase is used, rubbing treatmenton an alignment film is unnecessary; accordingly, electrostaticdischarge damage caused by the rubbing treatment can be prevented anddefects and damage of the liquid crystal display device in themanufacturing process can be reduced. Thus, productivity of the liquidcrystal display device can be increased. A transistor including an oxidesemiconductor stack particularly has a possibility that electriccharacteristics of the transistor may fluctuate significantly by theinfluence of static electricity and deviate from the designed range.Therefore, it is more effective to use a blue phase liquid crystalmaterial for a liquid crystal display device including a transistor thatincludes an oxide semiconductor stack.

Although a transmissive liquid crystal display device is described inthis embodiment, an embodiment of the present invention can also beapplied to a reflective liquid crystal display device or a transflectiveliquid crystal display device.

In this embodiment, a structure of the liquid crystal display device isdescribed in which a polarizing plate is provided on the outer surfaceof the substrate (on the viewer side) and a coloring layer and anelectrode used for a display element are provided on the inner surfaceof the substrate in this order; however, the polarizing plate may beprovided on the inner surface of the substrate. The stacked structure ofthe polarizing plate and the coloring layer is not limited to that inthis embodiment and may be set as appropriate depending on materials ofthe polarizing plate and the coloring layer or conditions of themanufacturing process. Furthermore, a light-blocking layer serving as ablack matrix may be provided as needed.

In this embodiment, in order to reduce surface unevenness of thetransistors and to improve reliability of the transistors, thetransistors are covered with a protective layer or an insulating layerwhich functions as a planarizing insulating layer (the insulating layer4020, the insulating layer 4014, and the insulating layer 4021). Notethat the protective layer is provided to prevent entry of a contaminantimpurity such as an organic substance, a metal substance, or water vaporcontained in the air and is preferably a dense film. The protectivelayer may be formed with a single layer or a stacked layer using one ormore of a silicon oxide layer, a silicon nitride layer, a siliconoxynitride layer, a silicon nitride oxide layer, an aluminum oxidelayer, an aluminum nitride layer, an aluminum oxynitride layer, and analuminum nitride oxide layer by a sputtering method.

Here, a stack of insulating layers is formed as the protective layer. Asthe insulating layer 4020 that is a first layer, a silicon oxide layeris formed by a sputtering method. When a silicon oxide layer is used asa protective layer, oxygen is added to the oxide semiconductor layerthat is in contact with the protective layer, so that oxygen defects canbe reduced.

The insulating layer 4014 is formed as a second layer of the protectivelayer. Here, as the second layer that is the insulating layer 4014, asilicon nitride layer which is one of nitride insulating layers isformed by a plasma CVD method, and then heat treatment is performed. Theuse of the silicon nitride layer as the protective layer can preventions such as sodium ions from entering a semiconductor region, therebysuppressing variations in electric characteristics of the transistor.

The insulating layer 4021 is formed as a planarizing insulating layer.The insulating layer 4021 can be formed using an organic material suchas acrylic. Other than such organic materials, it is also possible touse a low-dielectric constant material (a low-k material), asiloxane-based resin, PSG (phosphosilicate glass), BPSG(borophosphosilicate glass), or the like. Note that the insulating layer4021 may be formed by stacking a plurality of insulating layers formedof these materials.

The pixel electrode 4030 and the counter electrode 4031 can be formed ofa light-transmitting conductive material such as indium oxide containingtungsten oxide, indium zinc oxide containing tungsten oxide, indiumoxide containing titanium oxide, indium tin oxide containing titaniumoxide, indium tin oxide, indium zinc oxide, or indium tin oxide to whichsilicon oxide is added.

Further, a variety of signals and potentials are supplied to the signalline driver circuit 4003, the scan line driver circuit 4004, and thepixel portion 4002 which are formed over one substrate from an FPC 4018.

In this embodiment, a connection terminal electrode 4015 is formed usingthe same conductive layer as the pixel electrode 4030 included in theliquid crystal element 4013. A terminal electrode 4016 is formed usingthe same conductive layer as source and drain electrodes included in thetransistors 4010 and 4011.

The connection terminal electrode 4015 is electrically connected to aterminal included in the FPC 4018 through an anisotropic conductivelayer 4019.

In addition, if needed, a color filter is provided in each of thepixels. In addition, a polarization plate and a diffusing plate areprovided on the outer sides of the first substrate 4001 and the secondsubstrate 4006. Further, a light source of a backlight is formed using acold-cathode tube or an LED. Thus, a liquid crystal display module isobtained.

The liquid crystal display module can employ a TN (Twisted Nematic)mode, an IPS (In-Plane-Switching) mode, an FFS (Fringe Field Switching)mode, an MVA (Multi-domain Vertical Alignment) mode, a PVA (PatternedVertical Alignment) mode, an ASM (Axially Symmetric aligned Micro-cell)mode, an OCB (Optical Compensated Birefringence) mode, an FLC(Ferroelectric Liquid Crystal) mode, an AFLC (Anti Ferroelectric LiquidCrystal) mode, or the like.

Through the above process, a liquid crystal display device can bemanufactured. Although FIGS. 20A and 20B illustrate a transmissiveliquid crystal display device, the present invention is applicable to atransflective liquid crystal display device or a reflective liquidcrystal display device.

The transistor including the oxide semiconductor stack that isc-axis-aligned perpendicularly to the surface and described inEmbodiment 6 has high field-effect mobility; therefore, when a liquidcrystal display device is manufactured using the transistor as describedin this embodiment, a liquid crystal display device having excellentdisplay characteristics is realized. Furthermore, in this embodiment,when a still image is displayed, by operating the driver circuit portionso as to stop the output of a signal to be supplied to a signal line ora scan line, power consumption of the driver circuit portion as well asthe pixel portion can be reduced.

This embodiment can be implemented in appropriate combination with theany of the structures described in other embodiments.

Embodiment 12

The appearance and the cross section of a light-emitting display panel(also referred to as a light-emitting panel) which corresponds to onemode of a semiconductor device will be described with reference to FIGS.21A and 21B. FIG. 21A is a top view of a panel in which a transistorincluding an oxide semiconductor stack that is c-axis alignedperpendicularly to the surface and an electroluminescence element (alsoreferred to as an EL element) formed over a first substrate are sealedbetween the first substrate and a second substrate with a sealant. FIG.21B is a cross-sectional view taken along line H-I of FIG. 21A.

A sealant 4505 is provided so as to surround a pixel portion 4502,signal line driver circuits 4503 a and 4503 b, and scan line drivercircuits 4504 a and 4504 b which are provided over a first substrate4501. In addition, a second substrate 4506 is provided over the pixelportion 4502, the signal line driver circuits 4503 a and 4503 b, and thescan line driver circuits 4504 a and 4504 b. Accordingly, the pixelportion 4502, the signal line driver circuits 4503 a and 4503 b, and thescan line driver circuits 4504 a and 4504 b are sealed together with afiller 4507, by the first substrate 4501, the sealant 4505, and thesecond substrate 4506. In this manner, it is preferable that thelight-emitting display panel be packaged (sealed) with a protective filmor a cover material with high air-tightness and little degasification soas not to be exposed to the external air.

The pixel portion 4502, the signal line driver circuits 4503 a and 4503b, and the scan line driver circuits 4504 a and 4504 b formed over thefirst substrate 4501 each include a plurality of transistors, and atransistor 4510 included in the pixel portion 4502 and a transistor 4509included in the signal line driver circuit 4503 a are illustrated as anexample in FIG. 21B.

For the transistors 4509 and 4510, the transistor which has highmobility, includes the oxide semiconductor stack that is c-axis alignedperpendicularly to the surface, and is described in Embodiment 6 can beemployed. In this embodiment, the transistors 4509 and 4510 aren-channel transistors.

Over an insulating layer 4544, a conductive layer 4540 is provided so asto overlap with a channel formation region of an oxide semiconductorstack in the transistor 4509 used for a driver circuit. A potential ofthe conductive layer 4540 may be the same as or different from that of agate electrode of the transistor 4509. The conductive layer 4540 canalso serve as a second gate electrode. The potential of the conductivelayer 4540 may be GND or 0 V, or the conductive layer 4540 may be in afloating state.

In the transistor 4509, as a protective insulating layer, an insulatinglayer 4541 is formed in contact with an oxide semiconductor stackincluding a channel formation region. The insulating layer 4541 can beformed using a material and a method which are similar to those of theoxide insulating layer 412 described in Embodiment 6. A protectiveinsulating layer 4514 is formed over the insulating layer 4541. Theprotective insulating layer 4514 can be formed using a material and amethod which are similar to those of the insulating layer 416 describedin Embodiment 6. Here, a silicon nitride layer is formed by a PCVDmethod as the protective insulating layer 4514.

In order to reduce the surface roughness of the transistors, theinsulating layer 4544 functioning as a planarizing insulating layer isformed over the protective insulating layer 4514. The insulating layer4544 may be formed using a material and a method which are similar tothose of the insulating layer 4021 described in Embodiment 11. Here,acrylic is used for the insulating layer 4544.

A first electrode 4517 that is a pixel electrode of a light-emittingelement 4511 is electrically connected to a source electrode or a drainelectrode of the transistor 4510. Note that the light-emitting element4511 has a stacked structure of the first electrode 4517, an EL layer4512, and a second electrode 4513, but there is no particular limitationon the structure. The structure of the light-emitting element 4511 canbe changed as appropriate depending on the direction in which light isextracted from the light-emitting element 4511, or the like.

A partition wall 4520 is formed using an organic resin layer or aninorganic insulating layer. It is particularly preferable that thepartition wall 4520 be formed using a photosensitive material and anopening be formed over the first electrode 4517 so that a sidewall ofthe opening is formed as an inclined surface with continuous curvature.

The EL layer 4512 may be formed using a single layer or by stacking aplurality of layers.

A protective layer may be formed over the second electrode 4513 and thepartition wall 4520 in order to prevent oxygen, hydrogen, moisture,carbon dioxide, or the like from entering the light-emitting element4511. As the protective layer, a silicon nitride layer, a siliconnitride oxide layer, a DLC layer, or the like can be formed.

In addition, a variety of signals and potentials are supplied to thesignal line driver circuits 4503 a and 4503 b, the scan line drivercircuits 4504 a and 4504 b, or the pixel portion 4502 from FPCs 4518 aand 4518 b.

A connection terminal electrode 4515 is formed using the same conductivelayer as the first electrode 4517 included in the light-emitting element4511, and a terminal electrode 4516 is formed using the same conductivelayer as the source and drain electrodes included in the transistors4509 and 4510.

The connection terminal electrode 4515 is electrically connected to aterminal included in the FPC 4518 a through an anisotropic conductivelayer 4519.

As the second substrate 4506 located in the direction in which light isextracted from the light-emitting element 4511 needs to have alight-transmitting property. In that case, a light-transmitting materialsuch as a glass plate, a plastic plate, a polyester film, or an acrylicfilm is used for the second substrate 4506.

As the filler 4507, an ultraviolet curable resin or a thermosettingresin can be used, in addition to an inert gas such as nitrogen orargon, and acrylic, an epoxy resin, or the like can be used. Forexample, nitrogen is used for the filler.

In addition, if needed, an optical film, such as a polarizing plate, acircularly polarizing plate (including an elliptically polarizingplate), a retardation plate (a quarter-wave plate or a half-wave plate),or a color filter, may be provided as appropriate on a light-emittingsurface of the light-emitting element.

Through the above process, a light-emitting display device (displaypanel) can be manufactured.

The transistor including the oxide semiconductor stack that isc-axis-aligned perpendicularly to the surface and described inEmbodiment 6 has high field-effect mobility; therefore, when alight-emitting display device is manufactured using the transistor asdescribed in this embodiment, a light-emitting display device havingexcellent display characteristics is realized. Furthermore, in thisembodiment, when a still image is displayed, by operating the drivercircuit portion so as to stop the output of a signal to be supplied to asignal line or a scan line, power consumption of the driver circuitportion as well as the pixel portion can be reduced.

This embodiment can be implemented in appropriate combination with anyof the structures described in other embodiments.

Embodiment 13

In this embodiment, an electronic paper will be described as a mode of asemiconductor device.

The transistor including the oxide semiconductor stack that isc-axis-aligned perpendicularly to the surface and obtained by the methoddescribed in Embodiment 6 may be used for an electronic paper in whichelectronic ink is driven by an element electrically connected to aswitching element. The electronic paper is also referred to as anelectrophoretic display device (electrophoretic display) and hasadvantages in that it has the same level of readability as plain paper,it has lower power consumption than other display devices, and it can bemade thin and lightweight.

There are a variety of modes of electrophoretic displays. For example,the electrophoretic display can have a structure in which a plurality ofmicrocapsules each including first particles having positive electriccharge and second particles having negative electric charge aredispersed in a solvent or a solute, and an electrical field is appliedto the microcapsules so that the particles in the microcapsules move inopposite directions from each other, and only a color of the particlesgathered on one side is displayed. Note that the first particles and thesecond particles each contain pigment and do not move without anelectric field. Moreover, the first particles and the second particleshave different colors (which may be colorless) from each other.

Thus, an electrophoretic display is a display that utilizes a so-calleddielectrophoretic effect by which a substance having a high dielectricconstant moves to a high-electric field region.

A solution in which the aforementioned microcapsules are dispersedthroughout a solvent is referred to as electronic ink. This electronicink can be printed on a surface of glass, plastic, cloth, paper, or thelike. Furthermore, by using a color filter or particles that have apigment, color display can be achieved.

In addition, if a plurality of the above microcapsules are arranged asappropriate over an active matrix substrate so as to be interposedbetween two electrodes, an active matrix display device can becompleted, and display can be performed by application of an electricfield to the microcapsules. For example, an active matrix substratewhich is formed using the transistor including the oxide semiconductorstack that is c-axis-aligned perpendicularly to the surface anddescribed in Embodiment 6 can be used.

Note that the first particles and the second particles in themicrocapsules can each be formed using a single material selected from aconductor material, an insulator material, a semiconductor material, amagnetic material, a liquid crystal material, a ferroelectric material,an electroluminescent material, an electrochromic material, and amagnetophoretic material, or formed using a composite material includingany of these.

FIG. 22 illustrates an active matrix electronic paper as an embodimentof a semiconductor device. A transistor 581 used for the semiconductordevice can be manufactured in a manner similar to that of the transistordescribed in Embodiment 6 and is a transistor with high mobility whichincludes an oxide semiconductor stack that is c-axis-alignedperpendicularly to the surface. In addition, an insulating layer 584 isa nitride insulating layer.

The electronic paper illustrated in FIG. 22 is an embodiment of adisplay device using a twisting ball display system. In the twistingball display system, spherical particles each colored in black and whiteare arranged between a first electrode and a second electrode which areelectrodes used for a display element, and a potential difference isgenerated between the first electrode and the second electrode tocontrol orientation of the spherical particles, so that display isperformed.

The transistor 581 which is formed over a first substrate 580 is atransistor having a bottom-gate structure and is covered with aninsulating layer 583 that is in contact with a semiconductor layer. Asource or drain electrode of the transistor 581 is electricallyconnected to a first electrode 587 through an opening formed ininsulating layers 583, 584, and 585. A cavity 594 exists between thefirst electrode 587 and a second electrode 588. The cavity 594 is filledwith liquid and a spherical particle having a black region 590 a and awhite region 590 b. A space around the cavity 594 is filled with afiller 595 such as a resin (see FIG. 22).

In addition, the first electrode 587 corresponds to a pixel electrode,and the second electrode 588 corresponds to a common electrode. Thesecond electrode 588 which is provided on a second substrate 596 iselectrically connected to a common potential line provided over the sameinsulating substrate as the transistor 581. By using a common connectionportion, the second electrode 588 and the common potential line can beelectrically connected to each other through conductive particlesarranged between the pair of substrates.

Further, instead of the twisting ball, an electrophoretic element can beused. A microcapsule having a diameter of about 10 μm to 200 μm in whichtransparent liquid, positively charged white microparticles, andnegatively charged black microparticles are encapsulated, is used. Inthe microcapsule provided between a first electrode and a secondelectrode, when an electric field is applied by the first electrode andthe second electrode, the white microparticles and the blackmicroparticles move in opposite directions to each other, so that whiteor black can be displayed. A display element using this principle is anelectrophoretic display element, and is referred to as an electronicpaper in general. Instead of the black microparticles, microparticles ofany of R, G, and B (R means red; G, green; and B, blue) may be used, sothat color display can be performed.

Through the above steps, the electronic paper can be manufactured.

In this embodiment, a so-called electronic paper is manufactured withthe use of the transistor including the oxide semiconductor stack thatis c-axis-aligned perpendicularly to the surface and described inEmbodiment 6. Since the transistor has high field-effect mobility, whenthe electronic paper is manufactured using the transistor, theelectronic paper can have excellent display characteristics.

This embodiment can be implemented in appropriate combination with anyof the structures described in other embodiments.

Embodiment 14

A semiconductor device disclosed in this specification can be applied toa variety of electronic devices (including game machines). Examples ofelectronic devices are a television set (also referred to as atelevision or a television receiver), a monitor of a computer or thelike, a camera such as a digital camera or a digital video camera, adigital photo frame, a mobile phone handset (also referred to as amobile phone or a mobile phone device), a portable game console, aportable information terminal, an audio reproducing device, alarge-sized game machine such as a pachinko machine, and the like.

In this embodiment, embodiments of an electronic device on which thedisplay device obtained in any of Embodiments 11 to 13 is mounted aredescribed with reference to FIGS. 23A to 23E and FIG. 24.

FIG. 23A illustrates a laptop personal computer which is manufactured bymounting at least a display device as a component and which includes amain body 3001, a housing 3002, a display portion 3003, a keyboard 3004,and the like. Note that this laptop personal computer includes theliquid crystal display device described in Embodiment 11.

FIG. 23B illustrates a portable information terminal (which is alsoreferred to as a personal digital assistant (PDA)) which is manufacturedby mounting at least a display device as a component. A main body 3021is provided with a display portion 3023, an outside interface 3025, anoperation button 3024, and the like. In addition, the portableinformation terminal has a stylus 3022 as an accessory for operation.Note that this portable information terminal includes the light-emittingdisplay device described in Embodiment 12.

FIG. 23C illustrates an e-book reader manufactured by mounting theelectronic paper described in Embodiment 13 as a component. FIG. 23Cillustrates an embodiment of an e-book reader. For example, an e-bookreader 2700 includes two housings, a housing 2701 and a housing 2703.The housing 2701 and the housing 2703 are combined with a hinge 2711 sothat the e-book reader 2700 can be opened and closed with the hinge 2711as an axis. With such a structure, the e-book reader 2700 can operatelike a paper book.

A display portion 2705 and a display portion 2707 are incorporated inthe housing 2701 and the housing 2703, respectively. The display portion2705 and the display portion 2707 may display one image or differentimages. In the structure where different images are displayed on thedisplay portion 2705 and the display portion 2707, for example, theright display portion (the display portion 2705 in FIG. 23C) can displaytext and the left display portion (the display portion 2707 in FIG. 23C)can display images.

FIG. 23C illustrates an embodiment in which the housing 2701 is providedwith an operation portion and the like. For example, the housing 2701 isprovided with a power switch 2721, an operation key 2723, a speaker2725, and the like. With the operation key 2723, pages can be turned.Note that a keyboard, a pointing device, or the like may also beprovided on the surface of the housing, on which the display portion isprovided. Furthermore, an external connection terminal (an earphoneterminal, a USB terminal, or the like), a recording medium insertionportion, and the like may be provided on the back surface or the sidesurface of the housing. Moreover, the e-book reader 2700 may have afunction of an electronic dictionary.

The e-book reader 2700 may have a configuration capable of wirelesslytransmitting and receiving data. Through wireless communication, desiredbook data or the like can be purchased and downloaded from an electronicbook server.

FIG. 23D illustrates a mobile phone which is manufactured by mounting atleast a display device as a component and which includes two housings, ahousing 2800 and a housing 2801. The housing 2801 is provided with adisplay panel 2802, a speaker 2803, a microphone 2804, a pointing device2806, a camera lens 2807, an external connection terminal 2808, and thelike. The housing 2800 is provided with a solar cell 2810 for chargingof the mobile phone, an external memory slot 2811, and the like.Further, an antenna is incorporated in the housing 2801.

Further, the display panel 2802 is provided with a touch panel. Aplurality of operation keys 2805 which are displayed as images areillustrated by dashed lines in FIG. 23D. Note that a boosting circuit bywhich a voltage output from the solar cell 2810 is increased to be avoltage necessary for each circuit is also included.

In the display panel 2802, the direction of display is changedappropriately depending on an application mode. Further, the mobilephone is provided with the camera lens 2807 on the same surface as thedisplay panel 2802, and thus it can be used as a video phone. Thespeaker 2803 and the microphone 2804 can be used for videophone,recording, playback, and the like without being limited to voice calls.Further, the housings 2800 and 2801 in a state where they are developedas illustrated in FIG. 23D can shift by sliding to a state where one islapped over the other; therefore, the size of the mobile phone can bereduced, which makes the mobile phone suitable for being carried.

The external connection terminal 2808 can be connected to an AC adapterand various types of cables such as a USB cable, and charging and datacommunication with a personal computer or the like are possible.Moreover, a large amount of data can be stored and moved by inserting astorage medium into the external memory slot 2811.

Further, in addition to the above functions, an infrared communicationfunction, a television reception function, or the like may be provided.

FIG. 23E illustrates a digital camera which is manufactured by mountingat least a display device as a component and which includes a main body3051, a display portion (A) 3057, an eyepiece portion 3053, an operationswitch 3054, a display portion (B) 3055, a battery 3056, and the like.

FIG. 24 illustrates an embodiment of a television set. In a televisionset 9600, a display portion 9603 is incorporated in a housing 9601. Thedisplay portion 9603 can display images. Here, the housing 9601 issupported by a stand 9605.

The television set 9600 can be operated with an operation switch of thehousing 9601 or a separate remote controller 9610. Channels and volumecan be controlled with an operation key 9609 of the remote controller9610 so that an image displayed on the display portion 9603 can becontrolled. Furthermore, the remote controller 9610 may be provided witha display portion 9607 for displaying data output from the remotecontroller 9610.

Note that the television set 9600 is provided with a receiver, a modem,and the like. With the use of the receiver, general televisionbroadcasting can be received. Moreover, when the television set isconnected to a communication network with or without wires via themodem, one-way (from a sender to a receiver) or two-way (between asender and a receiver or between receivers) data communication can beperformed.

In the display portion 9603, a plurality of the transistors described inEmbodiment 6 are provided as switching elements of pixels. As a drivercircuit formed over the same insulating substrate as the display portion9603, the transistor with high mobility, which is described inEmbodiment 6, is provided.

This embodiment can be freely combined with any of Embodiments 1 to 13.

This application is based on Japanese Patent Application serial no.2009-296825 filed with Japan Patent Office on Dec. 28, 2009, the entirecontents of which are hereby incorporated by reference.

1. A method for manufacturing a semiconductor device comprising: forminga first multi-component oxide semiconductor layer over a substrate;forming a single-component oxide semiconductor layer over the firstmulti-component oxide semiconductor layer; forming a secondmulti-component oxide semiconductor layer over the single-componentoxide semiconductor layer; and performing a heat treatment to formsingle crystal regions in the single-component oxide semiconductor layerand to perform crystal growth from the single crystal regions in thesingle-component oxide semiconductor layer.
 2. The method formanufacturing a semiconductor device according to claim 1, wherein theheat treatment is performed at higher than or equal to 500° C. and lowerthan or equal to 1000° C.
 3. The method for manufacturing asemiconductor device according to claim 1, wherein crystal growth of thefirst multi-component oxide semiconductor layer is carried out using thesingle-component oxide semiconductor layer including the single crystalregions as a seed crystal to form single crystal regions in the firstmulti-component oxide semiconductor layer.
 4. The method formanufacturing a semiconductor device according to claim 1, whereincrystal growth of the second multi-component oxide semiconductor layeris carried out using the single-component oxide semiconductor layerincluding the single crystal regions as a seed crystal to form singlecrystal regions in the second multi-component oxide semiconductor layer.5. The method for manufacturing a semiconductor device according toclaim 1, wherein the single-component oxide semiconductor layerincluding the single crystal regions has an a-b plane parallel to asurface and a c-axis perpendicular to the surface.
 6. The method formanufacturing a semiconductor device according to claim 3, wherein thefirst multi-component oxide semiconductor layer including the singlecrystal regions has an a-b plane parallel to a surface and a c-axisperpendicular to the surface.
 7. The method for manufacturing asemiconductor device according to claim 4, wherein the secondmulti-component oxide semiconductor layer including the single crystalregions has an a-b plane parallel to a surface and a c-axisperpendicular to the surface.
 8. The method for manufacturing asemiconductor device according to claim 1, wherein the single-componentoxide semiconductor layer has a hexagonal crystal structure.
 9. Themethod for manufacturing a semiconductor device according to claim 1,wherein the single-component oxide semiconductor layer comprises zincoxide.
 10. The method for manufacturing a semiconductor device accordingto claim 1, wherein each of the first multi-component oxidesemiconductor layer, the single-component oxide semiconductor layer, andthe second multi-component oxide semiconductor layer is dehydrated ordehydrogenated.
 11. The method for manufacturing a semiconductor deviceaccording to claim 1, wherein each of the first multi-component oxidesemiconductor layer, the single-component oxide semiconductor layer, andthe second multi-component oxide semiconductor layer is intrinsicsemiconductor.
 12. A method for manufacturing a semiconductor devicecomprising: forming a first multi-component oxide semiconductor layerover a substrate; forming a single-component oxide semiconductor layerover the first multi-component oxide semiconductor layer; performing afirst heat treatment to form a single-component oxide semiconductorlayer including single crystal regions and to perform crystal growth ofthe first multi-component oxide semiconductor layer from thesingle-component oxide semiconductor layer including single crystalregions so as to form a first multi-component oxide semiconductor layerincluding single crystal regions; forming a second multi-component oxidesemiconductor layer over the single-component oxide semiconductor layerincluding single crystal regions; and performing a second heat treatmentto form a second multi-component oxide semiconductor layer includingsingle crystal regions.
 13. The method for manufacturing a semiconductordevice according to claim 12, further comprising: etching a stack of thefirst multi-component oxide semiconductor layer, the single-componentoxide semiconductor layer, and the second multi-component oxidesemiconductor layer into an island-shape; forming a source electrode anda drain electrode over the stack; forming a gate insulating layer overthe source electrode and the drain electrode; and forming a gateelectrode over the gate insulating layer.
 14. The method formanufacturing a semiconductor device according to claim 12, furthercomprising: forming a gate electrode and a gate insulating layer overthe substrate before formation of the first multi-component oxidesemiconductor layer; etching a stack of the first multi-component oxidesemiconductor layer, the single-component oxide semiconductor layer, andthe second multi-component oxide semiconductor layer into anisland-shape; and forming a source electrode and a drain electrode overthe stack.
 15. The method for manufacturing a semiconductor deviceaccording to claim 12, wherein each of the first heat treatment and thesecond heat treatment is performed at higher than or equal to 500° C.and lower than or equal to 1000° C.
 16. The method for manufacturing asemiconductor device according to claim 12, wherein crystal growth ofthe first multi-component oxide semiconductor layer is carried out usingthe single-component oxide semiconductor layer including single crystalregions as a seed crystal to form the single crystal regions in thefirst multi-component oxide semiconductor layer.
 17. The method formanufacturing a semiconductor device according to claim 12, whereincrystal growth of the second multi-component oxide semiconductor layeris carried out using the single-component oxide semiconductor layerincluding single crystal regions as a seed crystal to form the singlecrystal regions in the second multi-component oxide semiconductor layer.18. The method for manufacturing a semiconductor device according toclaim 12, wherein each of the single-component oxide semiconductor layerincluding single crystal regions, the first multi-component oxidesemiconductor layer including single crystal regions, and the secondmulti-component oxide semiconductor layer including single crystalregions has an a-b plane parallel to a surface and a c-axisperpendicular to the surface.
 19. The method for manufacturing asemiconductor device according to claim 12, wherein the single-componentoxide semiconductor layer has a hexagonal crystal structure.
 20. Themethod for manufacturing a semiconductor device according to claim 12,wherein the single-component oxide semiconductor layer comprises zincoxide.
 21. The method for manufacturing a semiconductor device accordingto claim 12, wherein each of the single-component oxide semiconductorlayer including single crystal regions, the first multi-component oxidesemiconductor layer including single crystal regions, and the secondmulti-component oxide semiconductor layer including single crystalregions is dehydrated or dehydrogenated.
 22. The method formanufacturing a semiconductor device according to claim 12, wherein acarrier density of each of the single-component oxide semiconductorlayer including single crystal regions, the first multi-component oxidesemiconductor layer including single crystal regions, and the secondmulti-component oxide semiconductor layer including single crystalregions is lower than 1×10¹⁴ cm⁻³.
 23. The method for manufacturing asemiconductor device according to claim 12, wherein a carrier density ofeach of the single-component oxide semiconductor layer including singlecrystal regions, the first multi-component oxide semiconductor layerincluding single crystal regions, and the second multi-component oxidesemiconductor layer including single crystal regions is lower than1.45×10¹⁰ cm⁻³.
 24. The method for manufacturing a semiconductor deviceaccording to claim 12, wherein each of the single-component oxidesemiconductor layer including single crystal regions, the firstmulti-component oxide semiconductor layer including single crystalregions, and the second multi-component oxide semiconductor layerincluding single crystal regions is intrinsic semiconductor.
 25. Amethod for manufacturing a semiconductor device comprising: forming afirst multi-component oxide semiconductor layer over a substrate;forming a single-component oxide semiconductor layer over the firstmulti-component oxide semiconductor layer; performing a heat treatmentto form a single-component oxide semiconductor layer including singlecrystal regions and to perform crystal growth of the firstmulti-component oxide semiconductor layer from the single-componentoxide semiconductor layer so as to form a first multi-component oxidesemiconductor layer including single crystal regions; and forming asecond multi-component oxide semiconductor layer including singlecrystal regions over the single-component oxide semiconductor layer by asputtering method while performing heating.
 26. The method formanufacturing a semiconductor device according to claim 25, furthercomprising: etching a stack of the first multi-component oxidesemiconductor layer, the single-component oxide semiconductor layer, andthe second multi-component oxide semiconductor layer into anisland-shape; forming a source electrode and a drain electrode over thestack; forming a gate insulating layer over the source electrode and thedrain electrode; and forming a gate electrode over the gate insulatinglayer.
 27. The method for manufacturing a semiconductor device accordingto claim 25, further comprising: forming a gate electrode and a gateinsulating layer over the substrate before formation of the firstmulti-component oxide semiconductor layer; etching a stack of the firstmulti-component oxide semiconductor layer, the single-component oxidesemiconductor layer, and the second multi-component oxide semiconductorlayer into an island-shape; and forming a source electrode and a drainelectrode over the stack.
 28. A semiconductor device comprising: anoxide semiconductor stack including a first multi-component oxidesemiconductor layer including single crystal regions, a single-componentoxide semiconductor layer including single crystal regions, and a secondmulti-component oxide semiconductor layer including single crystalregions; a gate electrode; a gate insulating layer provided between theoxide semiconductor stack and the gate electrode; and a wiringelectrically connected to the oxide semiconductor stack.
 29. Thesemiconductor device according to claim 28, wherein each of the firstmulti-component oxide semiconductor layer including single crystalregions, the single-component oxide semiconductor layer including singlecrystal regions, and the second multi-component oxide semiconductorlayer including single crystal regions has a c-axis perpendicular to asurface.
 30. The semiconductor device according to claim 28, wherein thegate electrode overlaps the oxide semiconductor stack with the gateinsulating layer provided therebetween.
 31. The semiconductor deviceaccording to claim 28, wherein the oxide semiconductor stack overlapsthe gate electrode with the gate insulating layer provided therebetween.32. The semiconductor device according to claim 28, wherein the wiringis provided between the oxide semiconductor stack and the gateinsulating layer.
 33. The semiconductor device according to claim 28,wherein the oxide semiconductor stack is provided between the gateinsulating layer and the wiring.